Light Emitting Element Sidewall Insulation for Etch-Free Active Layers

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Solution Overview

Problem

The manufacturing process of light emitting elements faces challenges in reducing defect risks and improving emission efficiency, particularly in achieving high-performance display devices with high resolution and small element sizes.

Innovation Solution

A method of manufacturing a light emitting element that involves forming a semiconductor stack member with a first and second semiconductor layer and an active layer, where the active layer is grown without a separate etching process, and an insulating layer is used to cover the side surfaces, minimizing defects and enhancing emission efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a separate etching process is used to form the active layer, then the manufacturing precision can be improved, but the manufacturing complexity and defect risk increase

Engineering Contradiction:
Improveactive layer formation precisionVSAvoidmanufacturing process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent extracts the etching process from the active layer formation sequence, eliminating the need for separate etching steps. The active layer is directly formed through selective growth on patterned semiconductor layers, removing the harmful etching环节 that causes defects and increases process complexity while maintaining precise dimensional control.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent performs preliminary patterning of the first and second semiconductor layers before growing the active layer. By pre-forming the semiconductor layer patterns with insulating layers, the active layer grows directly in the desired configuration without requiring subsequent etching, thus simplifying the overall process while achieving precise active layer formation.

Inventive Principle:
Principle #10Preliminary action

2Measurement precision

If the element size is reduced for high resolution displays, then the display resolution is improved, but the emission efficiency deteriorates

Engineering Contradiction:
Improvedisplay resolutionVSAvoidemission efficiency
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The patent applies local quality by creating different structural configurations at different locations within the light emitting element. The active layer is formed with specific thickness variations and compositional gradients in different regions, allowing optimized light emission efficiency in smaller elements while maintaining high resolution through precise local structural control rather than uniform design.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes physical parameters of the semiconductor layers and active layer, including composition ratios, thicknesses, and crystal structures. By adjusting these parameters locally in smaller elements, the emission efficiency is maintained or improved even as element size decreases for higher display resolution.

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If multiple separate processes are used to form semiconductor layers, then the manufacturing precision is improved, but the productivity decreases

Engineering Contradiction:
Improvesemiconductor layer formation precisionVSAvoidmanufacturing throughput
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent merges the formation of multiple semiconductor layers and the active layer into a single continuous growth process. By using selective epitaxial growth that simultaneously forms the first semiconductor layer, active layer, and second semiconductor layer in one operation, the patent achieves precise layer formation without requiring multiple separate fabrication steps, thus improving productivity while maintaining manufacturing precision.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces defect risks during manufacturing and enhances the emission efficiency of the light emitting element, enabling the production of high-performance display devices with improved resolution and smaller element sizes.

Implementation Method 1

forming an active layer and a second semiconductor layer on the first semiconductor layer

Methodology Applied
Scientific EffectEpitaxial growth: Epitaxy

Data Source

PatentUS20240243223A1Method of manufacturing light emitting element, light emitting element, and display device including light emitting element
Publication Date: 2024.07.18 SAMSUNG DISPLAY CO LTD
  • US20240243223A1 patent drawing
  • US20240243223A1 patent drawing
  • US20240243223A1 patent drawing

AI summary

A method of manufacturing a light emitting element includes forming a first semiconductor layer on a substrate; patterning a first insulating layer on a side surface of the first semiconductor layer; and forming an active layer and a second semiconductor layer on the first semiconductor layer.