Light Emission Analyzing Device for Plasma CVD Spectral Interference
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Solution Overview
Problem
In plasma CVD devices and other equipment, it is challenging to accurately calculate the ratio of light emission intensities between specific molecules or atoms due to interference from light emitted by raw material gases in a plasma state, making it difficult to observe the light emission intensity of molecules or atoms in thin films formed on substrates.
Innovation Solution
A light emission analyzing device that performs polynomial approximation on spectroscopic spectra measured by a spectrometer to isolate the light intensity corresponding to thermal emission as a continuous spectrum, allowing for the subtraction of plasma light intensity and the correct calculation of light emission intensities from molecules or atoms, thereby enabling accurate ratio calculation between different species.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the light intensity of raw material gas in plasma state is not subtracted, then the measurement can be performed simply, but the light emission intensity ratio between specific molecules or atoms cannot be calculated correctly
Solution Approach 1:
The patent extracts and removes the interfering light intensity component from the raw material gas in plasma state through polynomial approximation. By calculating the continuous spectrum background and subtracting it from the total measured intensity, the method isolates the discrete spectral lines from molecules or atoms in thin films, enabling accurate ratio calculations.
Solution Approach 2:
The patent introduces polynomial approximation as an intermediary tool to model and separate the continuous spectrum background from the discrete spectral lines. This mathematical intermediary allows for the decomposition of the complex spectrum into manageable components (background + specific emissions), facilitating precise measurement of target species.
2Measurement precision
If polynomial approximation is performed to separate plasma light intensity, then the light emission intensity ratio can be calculated correctly, but the calculation process becomes more complex
Solution Approach 1:
The patent replaces complex spectral decomposition methods with polynomial approximation, a more straightforward mathematical approach. Instead of using complex deconvolution algorithms or multiple measurement techniques, the method uses polynomial fitting to model the continuous background and subtract it, simplifying the overall calculation process while maintaining accuracy.
3Measurement precision
If the continuous spectrum background is not removed, then the analysis can be performed quickly, but the bright-line spectrum of molecules or atoms cannot be observed accurately
Solution Approach 1:
The patent performs preliminary background subtraction using polynomial approximation before analyzing the bright-line spectra. By removing the continuous spectrum background in advance, the method prepares the data for subsequent analysis, making the observation of discrete spectral lines clearer and more accurate without requiring time-consuming complex processing during the actual measurement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the precise calculation of light emission intensity ratios between specific molecules or atoms, improving the control of gas flow rates in plasma CVD devices and suppressing powder generation by distinguishing thermal emission from bright-line spectra.
Implementation Method 1
a spectrometer that measures a spectroscopic spectrum indicating a light intensity for each wavelength in a container
Implementation Method 2
perform polynomial approximation on a spectroscopic spectrum indicating a light intensity for each wavelength in a container as measured by a spectrometer so as to calculate the light intensity
Implementation Method 3
subtract, for each wavelength, the light intensity calculated by the first light intensity calculation unit from the light intensity indicated by the spectroscopic spectrum measured by the spectrometer so as to calculate a light intensity corresponding to a bright-line spectrum of a molecule or an atom
Implementation Method 4
calculate, by using the light intensity calculated by the second light intensity calculation unit, a ratio between (a) a peak value of a molecular spectrum of a first molecule or an atomic spectrum of a first atom and (b) a peak value of a molecular spectrum of a second molecule or an atomic spectrum of a second atom
Data Source
AI summary
The light emission analyzing device includes: a first light intensity calculation unit that performs polynomial approximation on a spectroscopic spectrum indicating a light intensity for each wavelength in a container as measured by a spectrometer so as to calculate the light intensity; a second light intensity calculation unit that subtracts, for each wavelength, the light intensity calculated by the first light intensity calculation unit from the light intensity indicated by the spectroscopic spectrum measured by the spectrometer so as to calculate a light intensity corresponding to a bright-line spectrum of a molecule; and a ratio calculation unit that calculates, by using the light intensity calculated by the second light intensity calculation unit, a ratio between (a) a peak value of a molecular spectrum of a first molecule and (b) a peak value of a molecular spectrum of a second molecule.