Light-Emitting Device With Ion Implantation Cavities
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Solution Overview
Problem
Conventional light-emitting diodes (LEDs) face challenges in enhancing light extraction efficiency due to their inherent structure, which limits their performance in terms of brightness and efficiency.
Innovation Solution
The method involves forming scattering cavities in a light-emitting device by ion implantation on a substrate, creating a patterned ion implantation region that facilitates the growth of a semiconductor stack with embedded barriers, resulting in cavities that scatter light and enhance extraction efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a conventional LED structure is used, then the device is simple to manufacture, but the light extraction efficiency is limited
Solution Approach 1:
The patent segments the substrate surface into multiple discrete scattering cavities through ion implantation, creating a patterned structure that enhances light extraction. The mask block is divided into multiple regions that define specific cavity locations, transforming the continuous substrate into a segmented structure with optimized optical properties.
Solution Approach 2:
The patent creates porous scattering cavities within the substrate using ion implantation. These cavities form a porous-like structure that increases the surface area and provides multiple interfaces for light scattering, thereby improving light extraction efficiency without significantly complicating the manufacturing process.
2Loss of energy
If the substrate surface is roughened to enhance light extraction, then the light extraction efficiency improves, but the manufacturing precision requirements increase
Solution Approach 1:
The patent applies preliminary action by forming the mask block structure before ion implantation. This pre-defined mask structure guides the ion implantation process to create cavities at precise locations with controlled dimensions, reducing the need for post-processing and lowering manufacturing precision requirements compared to direct roughening methods.
Solution Approach 2:
The patent replaces mechanical surface roughening with ion implantation, a physical process that uses ion bombardment to create cavities. This substitution eliminates the need for mechanical grinding or etching, thereby reducing manufacturing precision requirements while achieving the desired surface modification for enhanced light extraction.
3Loss of energy
If ion implantation is used to form scattering cavities, then the light extraction efficiency is significantly improved, but the device complexity increases
Solution Approach 1:
The substrate serves multiple functions: it acts as the mechanical support, the optical element for light extraction, and the medium for ion implantation. By making the substrate multi-functional, the patent reduces the need for additional separate components, thereby limiting the increase in device complexity despite the enhanced light extraction capability.
Solution Approach 2:
The mask block serves as an intermediary element that facilitates the ion implantation process. It defines the cavity pattern and protects surrounding areas during implantation, then can be removed after processing. This intermediary approach enables precise cavity formation without requiring complex masking or lithography steps, thus limiting the increase in device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly improves light extraction efficiency by creating a structured surface that directs and scatters light emitted from the active layer, leading to enhanced brightness and performance of the light-emitting device.
Implementation Method 1
implanting an ion into the portion of the substrate to form an ion implantation region
Implementation Method 2
creating a structured surface that directs and scatters light emitted from the active layer
Data Source
AI summary
A method of manufacturing a light-emitting device comprises the steps of: providing a substrate; forming a mask block contacting the substrate and exposing a portion of the substrate; implanting an ion into the portion of the substrate to form an ion implantation region; and forming a semiconductor stack on the substrate such that multiple cavities are formed between the semiconductor stack and the ion implantation region; wherein the mask block comprises a material made of metal or oxide.