Light-Emitting Sample Support for Charged Particle Beam Observation
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Solution Overview
Problem
The existing charged particle beam apparatuses face difficulties in observing samples with complex electrical systems, particularly when cultured cells require culturing on the sample support, as disconnecting electric wiring is time-consuming and challenging, especially when moving samples between different observation apparatuses.
Innovation Solution
A sample support with a light-emitting member that transforms charged particles into light, allowing for easy observation and detection without the need for external wiring, enabling simultaneous use with both charged particle beam and optical microscopes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Difficulty of detecting and measuring
If a sample support with electrical wiring is used for charged particle beam observation, then detection capability is improved, but ease of operation deteriorates due to time-consuming wiring disconnection
Solution Approach 1:
The patent extracts the electrical wiring from the sample support structure, replacing it with a light-emitting member that converts charged particles to light signals. This eliminates the wiring that caused operational difficulties while maintaining detection capability through optical signal generation and transmission.
Solution Approach 2:
The patent replaces the electrical system (wiring connected to semiconductor/metal film) with an optical system (light-emitting member transmitting light signals). This substitution eliminates the need for electrical connections and wiring disconnection, significantly improving ease of operation while preserving detection functionality.
2Measurement precision
If electrical wiring is connected to sample support for detection, then measurement precision is improved, but loss of time increases due to wiring disconnection requirements
Solution Approach 1:
The patent removes the electrical wiring component entirely from the sample support system, replacing it with a light-emitting member. This extraction eliminates the time-consuming wiring disconnection process while maintaining measurement precision through optical signal detection that converts charged particles to light.
Solution Approach 2:
The light-emitting member enables continuous operation without interruption for wiring disconnection. The optical signal generation and transmission system allows samples to be observed continuously across different apparatuses without the time loss associated with electrical connection/disconnection cycles.
3Adaptability or versatility
If a sample support functions as both detector and culture platform, then adaptability is improved, but device complexity increases due to integrated electrical systems
Solution Approach 1:
The patent replaces the complex electrical wiring system with a simple light-emitting member that converts charged particles to light. This substitution maintains the multi-functional capability (detection and culture platform) while dramatically reducing device complexity by eliminating electrical connections, semiconductors, and metal films.
Solution Approach 2:
The patent extracts the electrical detection system from the sample support, replacing it with an optical detection mechanism. This extraction simplifies the overall device structure while preserving the ability to function as both a detection device and a culture platform for biological samples.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution simplifies the observation process by eliminating the need for wiring disconnection and allows for common use of a sample support across different microscopes, reducing time and effort in sample preparation and observation.
Implementation Method 1
a light-emitting member that transforms charged particles into light
Data Source
Figure 1~2
Figure 3(a)~4(b)
Figure 5(a)~6(b)
AI summary
The purpose of the present invention is to eliminate the effort in placement and extraction of samples in observations using transmitted charged particles. A charged particle beam device (601) is characterized by having: a charged particle optical lens tube that irradiates a sample (6) with a primary charged particle beam; a sample stage on which a light emitting member (500) that emits light because of charged particles that have come by transmission internally in the sample (6) or scattering therefrom or a sample platform (600) having the light emitting member (500) is attachably and detachably disposed; and a detector (503) that detects the light emitted by the light emitting member.