Light-Emitting Sample Support for Charged Particle Beam Observation

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Solution Overview

Problem

The existing charged particle beam apparatuses face difficulties in observing samples with complex electrical systems, particularly when cultured cells require culturing on the sample support, as disconnecting electric wiring is time-consuming and challenging, especially when moving samples between different observation apparatuses.

Innovation Solution

A sample support with a light-emitting member that transforms charged particles into light, allowing for easy observation and detection without the need for external wiring, enabling simultaneous use with both charged particle beam and optical microscopes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Difficulty of detecting and measuring

If a sample support with electrical wiring is used for charged particle beam observation, then detection capability is improved, but ease of operation deteriorates due to time-consuming wiring disconnection

Engineering Contradiction:
Improvedetection capabilityVSAvoidease of sample mounting
Core Design Contradiction:
Difficulty of detecting and measuringVSEase of operation

Solution Approach 1:

The patent extracts the electrical wiring from the sample support structure, replacing it with a light-emitting member that converts charged particles to light signals. This eliminates the wiring that caused operational difficulties while maintaining detection capability through optical signal generation and transmission.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent replaces the electrical system (wiring connected to semiconductor/metal film) with an optical system (light-emitting member transmitting light signals). This substitution eliminates the need for electrical connections and wiring disconnection, significantly improving ease of operation while preserving detection functionality.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If electrical wiring is connected to sample support for detection, then measurement precision is improved, but loss of time increases due to wiring disconnection requirements

Engineering Contradiction:
Improvedetection precisionVSAvoidtime for wiring disconnection
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent removes the electrical wiring component entirely from the sample support system, replacing it with a light-emitting member. This extraction eliminates the time-consuming wiring disconnection process while maintaining measurement precision through optical signal detection that converts charged particles to light.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The light-emitting member enables continuous operation without interruption for wiring disconnection. The optical signal generation and transmission system allows samples to be observed continuously across different apparatuses without the time loss associated with electrical connection/disconnection cycles.

Inventive Principle:
Principle #20Continuity of useful action

3Adaptability or versatility

If a sample support functions as both detector and culture platform, then adaptability is improved, but device complexity increases due to integrated electrical systems

Engineering Contradiction:
Improvemulti-functionalityVSAvoidcomplexity of electrical wiring
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent replaces the complex electrical wiring system with a simple light-emitting member that converts charged particles to light. This substitution maintains the multi-functional capability (detection and culture platform) while dramatically reducing device complexity by eliminating electrical connections, semiconductors, and metal films.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent extracts the electrical detection system from the sample support, replacing it with an optical detection mechanism. This extraction simplifies the overall device structure while preserving the ability to function as both a detection device and a culture platform for biological samples.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution simplifies the observation process by eliminating the need for wiring disconnection and allows for common use of a sample support across different microscopes, reducing time and effort in sample preparation and observation.

Implementation Method 1

a light-emitting member that transforms charged particles into light

Methodology Applied
Scientific EffectLight emission from charged particle impact: Cathodoluminescence

Data Source

PatentEP2975631B1Charged particle beam device with sample platform, observation system and light emitting member
Publication Date: 2021.11.10 HITACHI HIGH TECH CORP
  • EP2975631B1 patent drawingFigure 1~2
  • EP2975631B1 patent drawingFigure 3(a)~4(b)
  • EP2975631B1 patent drawingFigure 5(a)~6(b)

AI summary

The purpose of the present invention is to eliminate the effort in placement and extraction of samples in observations using transmitted charged particles. A charged particle beam device (601) is characterized by having: a charged particle optical lens tube that irradiates a sample (6) with a primary charged particle beam; a sample stage on which a light emitting member (500) that emits light because of charged particles that have come by transmission internally in the sample (6) or scattering therefrom or a sample platform (600) having the light emitting member (500) is attachably and detachably disposed; and a detector (503) that detects the light emitted by the light emitting member.