Light Focusing Unit for Multi-Angle Spectral Analysis
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Solution Overview
Problem
Conventional spectroscopic ellipsometers have low sensitivity to the vertical geometric structure of thin film materials due to their single incidence-angle measurement, limiting their ability to accurately measure ultra-thin film thickness and optical properties.
Innovation Solution
A light focusing unit and spectrum measuring apparatus that guides polarized light to be incident on a sample at multiple incidence angles, enabling the measurement of both split-beam and arc-minute spectra of numerous wavelength bands using a light focusing section with a plano-convex cylindrical lens and a collimating section with detachable sub-parts of varying curvature radii.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single incidence-angle measurement is used, then the measurement speed is rapid, but the sensitivity to the vertical geometric structure of thin film materials is low
Solution Approach 1:
The patent introduces a new dimension by enabling multiple incidence angles to be measured simultaneously along with wavelength, transforming a single-point measurement into a multi-dimensional measurement space that captures both spectral and angular information, thereby improving sensitivity to vertical geometric structure while maintaining measurement speed
Solution Approach 2:
The patent segments the light path into multiple parallel beams that are focused at different incidence angles on the sample, allowing simultaneous measurement of multiple angles without requiring sequential scanning, thus maintaining rapid measurement speed while enhancing sensitivity
2Measurement precision
If multiple incidence angles are measured simultaneously, then the sensitivity to geometric and optical properties is enhanced, but the device complexity increases
Solution Approach 1:
The patent merges the functions of multiple incidence angle measurement and wavelength dispersion into a single integrated optical path, where the light focusing section simultaneously achieves both angular separation and spectral dispersion, reducing the need for separate optical components and thereby managing device complexity while enhancing measurement precision
Solution Approach 2:
The light focusing section is designed to perform multiple functions: it focuses light at different incidence angles, disperses wavelengths, and directs them to the detector, making the component universal and reducing the overall device complexity by eliminating the need for separate specialized components for each function
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances sensitivity to the geometric and optical properties of thin film materials, reducing measurement time while allowing for precise analysis of split-beam and arc-minute spectra across multiple incidence angles.
Implementation Method 1
a light focusing section configured to cause the light guided along the light incidence paths to be incident on a test position of a sample at different incidence angles
Implementation Method 2
a first emergence plane part formed on the other face of the focusing section body, and having a convex plane such that the light passing through the first incidence plane part and the focusing section body is guided at the different incidence angles
Implementation Method 3
a polarized light generator configured to polarize the light emitted from the light source section along multiple parallel light incidence paths
Implementation Method 4
a light collimating section configured to guide the light, which is focused on the test position of the sample and reflected at different emergence angles corresponding to the incidence angles, along multiple parallel light emergence paths
Data Source
AI summary
A light focusing unit and a spectrum measuring apparatus having the same are provided. The light focusing unit includes a light source section configured to emit light, a light guiding section configured to guide the light emitted from the light source section along multiple parallel light incidence paths, and a light focusing section configured to direct the light from the guiding section to be incident on a test position of a sample at different incidence angles.