Light Guide Plate Scattering Features for UV Uniformity
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Solution Overview
Problem
Current nanoimprint lithography techniques face challenges in achieving uniform and efficient UV light distribution for patterning in nano-fabrication, leading to variations in feature formation and throughput in semiconductor processing.
Innovation Solution
A light guide plate with scattering features is used to direct UV light from an actinic energy source, ensuring high transmission efficiency (>80%) and tailored intensity distribution across the substrate, while being transparent to non-UV light, to enhance the nanoimprint lithography process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a high power lamp or laser is used to expose formable material to UV light, then the solidification process can be achieved, but uniform light distribution and intensity control across the substrate become difficult
Solution Approach 1:
A light guide plate is introduced as an intermediary component between the UV light source and the formable material. The light guide plate receives UV light from the actinic energy source and distributes it uniformly across the substrate through scattering features, decoupling the high power source from the uniformity requirement at the substrate level
Solution Approach 2:
Scattering features are selectively positioned at specific locations within the light guide plate to create localized light redistribution. This allows different regions of the substrate to receive appropriately distributed UV light intensity, achieving uniform overall illumination while maintaining local control over light distribution characteristics
2Device complexity
If conventional light sources are used without light guide plates, then the system structure is simpler, but UV light transmission efficiency and distribution control are insufficient
Solution Approach 1:
The light guide plate serves as an optical intermediary that efficiently transfers UV light from the source to the substrate with minimal loss. The plate's optical properties and scattering features are designed to maximize light transmission efficiency while maintaining uniform distribution, achieving >80% UV light transmission efficiency
Solution Approach 2:
The light guide plate's optical parameters (refractive index, scattering feature geometry, material composition) are optimized to enhance UV light transmission efficiency. By controlling these parameters, the system achieves high transmission efficiency while maintaining a relatively simple overall structure
3Power
If UV light is used for patterning, then formable material solidification is achieved, but heat generation and non-UV light interference occur
Solution Approach 1:
The back surface of the light guide plate is designed with selective optical properties: it reflects UV light back toward the output face while being transparent to visible light and heat irradiation. This localized functional differentiation allows the plate to address multiple harmful effects simultaneously through spatial separation of optical responses
Solution Approach 2:
The light guide plate converts potentially harmful heat irradiation and visible light into beneficial transparent transmission, allowing these wavelengths to pass through without interference while the UV light is reflected and redistributed. The harmful thermal and visible light components are effectively filtered and transmitted separately from the UV patterning light
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides a uniform and efficient UV light distribution, improving the uniformity and intensity of pattern formation on the substrate, thereby enhancing the nano-fabrication process and increasing production yields in semiconductor processing.
Implementation Method 1
The light guide plate may have a plurality of scattering features that are configured to scatter UV light received from the input edge
Implementation Method 2
The back surface may reflect UV light towards the light output face and is transparent to non-UV light
Data Source
AI summary
A light source, a shaping system using the light source, and a method of using the light source in a shaping system. The light source may comprise one or more actinic energy sources; and a light guide plate. The light guide plate may have at least: a light output face; an input edge; and a back surface facing opposite the light output face. Wherein, the input edge of the light guide plate may be arranged to receive UV light from the one or more actinic energy sources. Wherein, the light guide plate may have a plurality of scattering features that are configured to scatter UV light received from the input edge. Wherein, the back surface may reflect UV light towards the light output face and is transparent to non-UV light.