Light Intensity Modulator for High Resolution Surface Measurement
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Solution Overview
Problem
Current optical measurement systems face challenges in capturing high-resolution images of uneven or inconsistent surfaces, particularly under 10 μm scale, due to variations in light intensity and slow measuring speeds, and existing methods like Moiré interferometry and high-resolution techniques using charge-coupled or complementary metal oxide semiconductor sensors are inefficient for such applications.
Innovation Solution
A system comprising a beam splitter assembly, a light intensity modulator, and an image processing module that generates a modulating beam with predetermined noise, which is projected onto an object to obtain multiple modulating images, allowing for the construction of high-resolution images through analysis by the image processing module.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If Moiré interferometry technology is used to measure surfaces, then measurement speed is improved, but measurement precision deteriorates for surfaces under 10 μm scale
Solution Approach 1:
The patent changes the physical parameter of light by introducing amplitude modulation with white noise to the measurement beam. This modulation creates time-varying intensity patterns that enhance the detectability of surface features below the diffraction limit, thereby improving measurement precision without sacrificing the speed advantages of Moiré interferometry
Solution Approach 2:
The patent introduces white noise as an intermediary element in the measurement process. The noise acts as a mediator that carries information about surface topography through its amplitude modulation, enabling detection of sub-10 μm features while maintaining fast measurement speeds through temporal analysis
2Measurement precision
If charge-coupled sensors or complementary metal oxide semiconductor sensors are used to measure large areas with high resolution, then measurement precision is improved, but measurement speed deteriorates
Solution Approach 1:
The patent employs periodic amplitude modulation of the light beam with white noise characteristics. This periodic action encodes spatial information into temporal variations, allowing high-resolution measurement of large areas to be performed at high speeds by analyzing the time-varying signal patterns rather than requiring slow pixel-by-pixel scanning
Solution Approach 2:
The patent replaces the mechanical scanning approach with sensor-based high resolution measurement with an optical modulation approach. By modulating the light intensity with white noise and analyzing the temporal signal, the system achieves both high resolution and high speed without the mechanical constraints of traditional sensor scanning methods
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the resolution and speed of image capture, reducing quantization errors and deviation in height measurements to ±0.1 μm, improving the accuracy and efficiency of surface measurements compared to traditional methods.
Implementation Method 1
The beam splitter reflects an input light beam to generate a splitting beam
Implementation Method 2
The light intensity modulator modulates the intensity of the splitting beam to generate a modulating beam
Implementation Method 3
the light intensity of the reflected light beam or scattering light beam on the surface will vary
Data Source
AI summary
A system for constructing high resolution images includes a beam splitter assembly, a light intensity modulator, an image capturing module and an image processing module. The beam splitter assembly is utilized to reflect a light beam generated from a light source generating device and generate a splitting beam. The light intensity modulator is utilized to modulate the intensity of the splitting beam to generate a modulating beam, which includes a predetermined noise. The modulating beam is emitted onto an object to generate a modulating image. The image capturing module is utilized to obtain a plurality of modulating images. The image processing module is utilized to analyze the modulating images to generate a high resolution image.