Light Irradiating Device Segmented Cooling Module
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Solution Overview
Problem
Existing light irradiating devices in substrate processing systems require complex maintenance procedures, especially when replacing the light source, as it involves disassembling and reassembling cooling modules, which complicates the process and increases downtime.
Innovation Solution
The light irradiating device is designed with a separable light irradiating unit and power feed unit, allowing for individual assembly and disassembly, where the power feed unit provides a cooling module that thermally connects with the light irradiating unit's heat transfer module, enabling efficient cooling and simplifying maintenance by avoiding the need to disassemble the cooling module during light source replacement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the light source is integrated with the cooling module in a fixed structure, then the cooling effect is stable, but the maintenance complexity increases and replacement time is extended
Solution Approach 1:
The device is divided into a light irradiating unit containing the light source and a power feed unit containing the cooling module. These units can be separated and reconnected via connectors, allowing the light source to be replaced independently while the cooling module remains in the power feed unit, thus simplifying maintenance while maintaining stable cooling through the dedicated cooling pathway.
2Stability of the object's composition
If the light irradiating unit and power feed unit are permanently connected, then the structural stability is high, but the flexibility for maintenance and adaptation is reduced
Solution Approach 1:
The connection between the light irradiating unit and power feed unit is made dynamic rather than fixed. Connectors allow the units to be connected during operation for stable performance and disconnected during maintenance for flexible replacement, adapting the structural state to the operational requirements.
3Temperature
If the cooling module is integrated into the light irradiating unit, then the thermal management is efficient, but the device complexity for assembly and disassembly increases
Solution Approach 1:
The cooling module is extracted from the light irradiating unit and placed in the power feed unit. This extraction maintains efficient thermal management through the dedicated cooling pathway while reducing assembly and disassembly complexity, as the cooling module remains in the stationary power feed unit during light source replacement operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration simplifies the replacement of the light source, improves maintenance efficiency, and effectively cools the light source, reducing temperature drift and maintaining accurate temperature control, thereby enhancing the overall reliability and efficiency of the device.
Implementation Method 1
the power feed unit provides a cooling module that thermally connects with the light irradiating unit's heat transfer module, enabling efficient cooling
Data Source
AI summary
A light irradiating device includes a substrate holder configured to hold a substrate; a light irradiating unit; and a power feed unit. The light irradiating unit comprises a light source configured to irradiate light to a surface of the substrate; and a first connector electrically connected with the light source. The power feed unit comprises a power supply module configured to supply a power to the light source; and a second connector electrically connected with the power supply module and configured to be connected to or disconnected from the first connector. The light irradiating unit and the power feed unit are coupled as one body as the first connector and the second connector are connected, and are separated from each other as the first connector and the second connector are disconnected from each other.