Light Irradiation Device Gas Shielding Member Uniform Flow
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Solution Overview
Problem
The existing light irradiation devices face challenges in achieving uniform processing efficiency due to inadequate gas flow and conductance issues when the distance between the workpiece and the light transmitting window member is less than or equal to 1 mm, leading to insufficient processing gas distribution over the target surface, especially for larger workpieces.
Innovation Solution
A light irradiation device with a gas shielding member on the workpiece support, made from fluorocarbon resin, is used to direct processing gas flow uniformly along the target surface, preventing gas from flowing to the lateral sides and ensuring sufficient gas conductance, while maintaining a gap of less than 1 mm between the workpiece and the light transmitting window member.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the gap between the workpiece and the light transmitting window member is reduced to less than or equal to 1 mm, then the processing efficiency is improved, but the gas flow distribution becomes insufficient leading to non-uniform processing
Solution Approach 1:
The gas supply system is segmented into multiple gas supply ports positioned at different locations above the workpiece. This segmentation allows independent control of gas flow to different regions, enabling uniform gas distribution even when the gap between the workpiece and light transmitting window member is reduced to less than or equal to 1 mm, thus resolving the contradiction between processing efficiency and processing uniformity
Solution Approach 2:
Different regions of the processing chamber are provided with different gas flow characteristics through strategically positioned gas supply ports. The gas flow rate and distribution are locally optimized for each region above the workpiece, ensuring uniform processing conditions across the entire target surface while maintaining the small gap configuration for high processing efficiency
2Loss of time
If the workpiece upper gap is reduced to improve processing efficiency, then the processing time is reduced, but the gas conductance becomes insufficient leading to inadequate processing gas distribution
Solution Approach 1:
Processing gas is supplied in advance through multiple gas supply ports positioned above the workpiece before the vacuum ultraviolet beam irradiation begins. This preliminary gas supply ensures that sufficient processing gas is already distributed in the processing chamber and maintains proper flow patterns, compensating for the reduced gas conductance caused by the small workpiece upper gap of less than or equal to 1 mm
Solution Approach 2:
Multiple gas supply ports act as intermediary elements between the gas source and the workpiece surface. These intermediaries distribute the processing gas uniformly across different regions above the workpiece, ensuring adequate gas quantity and proper distribution even when the workpiece upper gap is reduced to improve processing efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures high uniformity in gas flow speed distribution and stable generation of ozone and reactive oxygen, allowing for efficient and uniform processing of larger workpieces with a high intensity vacuum ultraviolet beam.
Implementation Method 1
an ultraviolet lamp configured to irradiate a target surface of the workpiece with a vacuum ultraviolet beam
Implementation Method 2
a light transmitting window member disposed between the workpiece and the ultraviolet lamp and configured to transmit the vacuum ultraviolet beam
Implementation Method 3
A gas feeding unit is provided for feeding the processing gas into the gap in one direction along the target surface
Data Source
AI summary
A light irradiation device includes a workpiece support onto which a workpiece (object to be processed) is placed, an ultraviolet lamp for emitting a vacuum ultraviolet beam to a target surface (surface to be processed) of the workpiece, and a light transmitting window member disposed between the workpiece and the ultraviolet lamp and configured to pass the vacuum ultraviolet beam from the ultraviolet lamp therethrough. A gap defined between the target surface of the workpiece and the light transmitting window member is no greater than 1 mm. A gas supply unit is provided for supplying a processing gas into the gap such that the gas travels along the target surface in one direction. A gas blocking member is provided on the workpiece support in a region where the workpiece is not present. The region extends along a supply direction of the processing gas.