Light Modulator With Segmented III-V Layer

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Solution Overview

Problem

Existing light modulators face challenges in achieving excellent optical confinement performance and applying an electric field to a wide region in the core, due to issues such as constant thickness of semiconductor layers leading to increased light leakage and reduced optical confinement, and inadequate electric field application to the upper portions of the core.

Innovation Solution

A light modulator design featuring a substrate with specific areas for different III-V compound semiconductor layers and a core, where the first III-V compound semiconductor layer has varying thickness portions to enhance optical confinement and allow for wide electric field application across the core.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the semiconductor layer has constant thickness, then the structure is simple and easy to manufacture, but light leakage increases and optical confinement performance deteriorates

Engineering Contradiction:
Improveease of manufactureVSAvoidoptical confinement performance
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The semiconductor layer is designed with non-uniform thickness, featuring a first portion with smaller thickness and a second portion with larger thickness. This local variation in thickness optimizes optical confinement by creating different refractive index profiles in different regions, preventing light leakage while maintaining manufacturing feasibility through epitaxial growth processes.

Inventive Principle:
Principle #3Local quality

2Reliability

If the semiconductor layer thickness is increased, then optical confinement improves, but the electric field application to the upper portion of the core becomes inadequate

Engineering Contradiction:
Improveoptical confinement performanceVSAvoidelectric field application effectiveness
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The semiconductor layer incorporates a second portion with larger thickness specifically positioned to contact the upper portion of the core. This local thickness increase ensures effective electric field application to the upper core region while the first portion maintains appropriate thickness for overall optical confinement, thus resolving the contradiction between confinement and field application.

Inventive Principle:
Principle #3Local quality

3Reliability

If the first III-V compound semiconductor layer has smaller thickness portion, then optical confinement is enhanced, but the device complexity increases

Engineering Contradiction:
Improveoptical confinement performanceVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The first III-V compound semiconductor layer is segmented into a first portion with smaller thickness and a second portion with larger thickness. This segmentation allows different regions to perform different functions - the first portion optimizes optical confinement while the second portion enables effective electric field coupling to the upper core, achieving complex functionality through structured segmentation rather than a single uniform layer.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed design achieves excellent optical confinement and wide electric field application, improving modulation efficiency and expanding modulation bandwidth by optimizing the thickness and conductivity types of the semiconductor layers.

Implementation Method 1

the first III-V compound semiconductor layer includes a first portion having a thickness smaller than a thickness of the core in a second direction orthogonal to the main surface and a second portion having a thickness larger than the thickness of the first portion in the second direction

Methodology Applied
Scientific EffectOptical confinement: Refraction

Implementation Method 2

an electrode connected to the first III-V compound semiconductor layer

Methodology Applied
Scientific EffectElectric field: Electric Field

Data Source

PatentUS12326643B2Light modulator
Publication Date: 2025.06.10 SUMITOMO ELECTRIC INDUSTRIES LTD
  • US12326643B2 patent drawing
  • US12326643B2 patent drawing
  • US12326643B2 patent drawing

AI summary

The light modulator includes a substrate having a main surface including a first area, a second area, and a third area, a first III-V compound semiconductor layer of a first conductivity-type provided on the first area, a second III-V compound semiconductor layer of a first conductivity-type or a second conductivity-type provided on the second area, a core provided on the third area and including a group III-V compound semiconductor, and an electrode connected to the first III-V compound semiconductor layer. The first III-V compound semiconductor layer includes a first portion having a thickness smaller than a thickness of the core in a second direction orthogonal to the main surface and a second portion having a thickness larger than the thickness of the first portion in the second direction. The second portion is disposed between the first portion and the core.