Light Scattering Probe Structure for Precise Pinpoint Detection

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Solution Overview

Problem

Conventional cantilever probe cards suffer from detection errors due to the structural design of cantilever probes, where adjacent portions interfere with detection apparatuses, leading to imprecise pinpoint positioning.

Innovation Solution

The introduction of light scattering probes with a roughened surface on the upright portion of the testing segment, featuring an arithmetic average roughness of 0.1 μm to 1 μm, allows the detection apparatus to focus on the pinpoint portion, reducing interference and enhancing precision.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a conventional cantilever probe structure is used, then the device structure is simple, but detection errors occur due to interference from adjacent portions of the probe

Engineering Contradiction:
Improvepinpoint positioning precisionVSAvoidprobe structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The probe structure is designed with different surface qualities at different locations: the upright portion has a roughened surface with Ra of 0.1-1 μm to scatter light and improve detection precision, while the arm segment maintains a smooth surface. This local differentiation allows the detection apparatus to clearly identify the pinpoint portion without interference from adjacent areas, resolving the contradiction between measurement precision and structural simplicity.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The roughened surface on the upright portion creates optical contrast through light scattering, effectively making the pinpoint portion visually distinguishable from other parts of the probe. This optical property change enables the detection apparatus to focus on the correct location, improving measurement precision without requiring complex mechanical adjustments.

Inventive Principle:
Principle #32Color changes

2Measurement precision

If the entire probe surface is roughened, then detection precision improves, but manufacturing complexity and cost increase

Engineering Contradiction:
Improvedetection precisionVSAvoidmanufacturing ease
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

Instead of roughening the entire probe surface, only the upright portion is treated with a roughened surface (Ra of 0.1-1 μm). This localized treatment achieves the necessary light scattering effect for precise detection while minimizing the area requiring complex manufacturing processes, thus balancing detection precision with manufacturing ease.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The probe is divided into functional segments with different surface treatments: the upright portion receives roughening treatment for detection purposes, while the arm segment remains smooth. This segmentation allows selective application of manufacturing processes, reducing overall manufacturing complexity while maintaining detection precision.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The roughened surface enables precise pinpoint positioning, facilitating accurate detection by scattering light and minimizing detection errors, thus improving the operational efficiency of cantilever probe cards.

Implementation Method 1

The upright portion has a roughened surface arranged on an entirety of an outer surface thereof. The roughened surface has an arithmetic average roughness (Ra) within a range from 0.1 μm to 1 μm. Through the roughened surface, the testing segment only forms an observation point at the pinpoint portion in an observation process of a detection apparatus.

Methodology Applied
Scientific EffectLight scattering: Scattering

Data Source

PatentUS12601759B2Cantilever probe card device and light scattering probe
Publication Date: 2026.04.14 CHUNGHWA PRECISION TEST TECH
  • US12601759B2 patent drawing
  • US12601759B2 patent drawing
  • US12601759B2 patent drawing

AI summary

A light scattering probe includes an arm segment, a main segment located at one side of the arm segment, and a testing segment connected to another side of the arm segment. The main segment has a soldering end portion and an extending end portion respectively located at two opposite sides thereof along a predetermined direction. The testing segment has an upright shape along the predetermined direction and includes a pinpoint portion and an upright portion that connects the pinpoint portion and the arm segment. The upright portion has a roughened surface arranged on an entirety of an outer surface thereof. The roughened surface has an arithmetic average roughness (Ra) within a range from 0.1 μm to 1 μm. Through the roughened surface, the testing segment only forms an observation point at the pinpoint portion in an observation process of a detection apparatus.