Light Detection Sensor Layout for Fast Abnormality Inspection

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Solution Overview

Problem

Current light detection devices lack an efficient method for inspection, making it difficult to quickly and accurately identify abnormal devices, especially in mass production scenarios where lengthy inspection times are impractical.

Innovation Solution

A light detection device with separate regions, one equipped with lenses and the other without, allows for independent output extraction via pad electrodes, enabling easy inspection by measuring output values under controlled conditions, and an inspection method that compares these values to determine device normalcy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a light detection device uses a single uniform region for light detection, then the device structure is simple, but inspection becomes difficult and time-consuming

Engineering Contradiction:
Improveinspection easeVSAvoiddevice structure
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The light detection device is divided into a first region with light detection elements and lenses for normal light detection, and a second region with light detection elements but no lenses for inspection purposes. This segmentation allows the device to have both simple inspection capability and maintained functional performance, resolving the contradiction between inspection ease and device structure complexity.

Inventive Principle:
Principle #1Segmentation

2Measurement precision

If inspection methods require complex procedures, then measurement precision may improve, but inspection time increases significantly

Engineering Contradiction:
Improveinspection accuracyVSAvoidinspection time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The second region is prepared in advance during device manufacturing with light detection elements but without lenses, creating a built-in inspection channel. This preliminary action eliminates the need for complex external inspection setups during actual inspection, enabling quick and accurate comparison measurements that reduce inspection time while maintaining precision.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The second region acts as a reference copy of the light detection element structure without the lens component. By comparing the output of this reference region with the first region, inspection can be performed quickly using simple comparison methods rather than complex measurement procedures, reducing inspection time while maintaining accuracy.

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Facilitates rapid and accurate inspection of light detection devices by leveraging the output differences between regions to identify abnormalities, enhancing production efficiency and quality control.

Implementation Method 1

a plurality of first lenses respectively located on the plurality of first semiconductor light detection elements

Methodology Applied
Scientific EffectLight concentration: Lens

Data Source

PatentUS20230296776A1Light detection device, light detection system, lidar device, mobile body, inspection method, and method for manufacturing semiconductor device
Publication Date: 2023.09.21 KK TOSHIBA
  • US20230296776A1 patent drawing
  • US20230296776A1 patent drawing
  • US20230296776A1 patent drawing

AI summary

According to one embodiment, a light detection device includes a first region, a second region, a first electrode, and a second electrode. The first region includes a plurality of first semiconductor light detection elements, and a plurality of first lenses respectively located on the plurality of first semiconductor light detection elements. The second region includes a plurality of second semiconductor light detection elements. No lens is located directly above the plurality of second semiconductor light detection elements. The first electrode is electrically connected with the plurality of first semiconductor light detection elements. The second electrode is electrically connected with the plurality of second semiconductor light detection elements.