Light-Shielding Layer Layout for Contact Hole Short-Circuit Prevention
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Solution Overview
Problem
In electronic devices, the exposure of layers at positions adjacent to contact holes due to processes like etching can lead to short circuits, reducing the reliability of the devices.
Innovation Solution
The electronic device includes a substrate with a light-shielding layer, a first insulating layer, a semiconductor layer, a second insulating layer with a hole exposing the first insulating layer, and a drain connected to the semiconductor layer. The design ensures a specific ratio of distances between the insulating layer and the light-shielding layer, and the semiconductor layer and the light-shielding layer, to prevent short circuits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of moving object
If the distance between adjacent elements is reduced to increase pixel density, then the pixel size can be decreased, but the probability of layer exposure and short circuit increases
Solution Approach 1:
The patent applies preliminary action by forming the light-shielding layer before subsequent etching and patterning processes. This light-shielding layer is strategically positioned to protect underlying layers from exposure during manufacturing processes, preventing short circuits before they can occur. The layer is formed in advance to anticipate and prevent the exposure problem that would otherwise occur during subsequent processing steps.
Solution Approach 2:
The light-shielding layer functions as an intermediary protective element between the substrate and subsequent layers. It acts as a mediator that prevents direct exposure of underlying layers during etching and patterning processes, thereby preventing short circuits while allowing the miniaturization of pixel elements to proceed.
2Ease of manufacture
If etching and patterning processes are performed to create contact holes, then electrical connection between elements is achieved, but adjacent layers may be exposed causing short circuits
Solution Approach 1:
The patent applies preliminary anti-action by introducing the light-shielding layer specifically to counteract the harmful effect of layer exposure during etching and patterning. This protective layer is positioned to preemptively block the exposure of underlying layers that would otherwise occur during the necessary electrical connection processes, thus preventing short circuits while maintaining manufacturing feasibility.
3Device complexity
If the first insulating layer is positioned close to the light-shielding layer to reduce device complexity, then manufacturing is simplified, but short circuit risk increases due to layer exposure
Solution Approach 1:
The light-shielding layer is formed in advance before subsequent processing steps that could cause exposure. By establishing this protective layer early in the manufacturing sequence, the patent prevents layer exposure issues without requiring complex additional structures, thus maintaining manufacturing simplicity while improving reliability.
Data Source
AI summary
An electronic device including a substrate, a light-shielding layer, a first insulating layer, a semiconductor layer, a second insulating layer and a drain is disclosed. The light-shielding layer is disposed on the substrate. The first insulating layer is disposed on the light-shielding layer. The semiconductor layer is disposed on the first insulating layer. The second insulating layer is disposed on the semiconductor layer and has a hole, and the hole exposes a portion of the first insulating layer. The drain is connected to the semiconductor layer through the hole. A first minimum distance exists between the above portion of the first insulating layer and the light-shielding layer, a second minimum distance exists between the semiconductor layer and the light-shielding layer, and a ratio of the first minimum distance to the second minimum distance is greater than or equal to 0.1 and less than or equal to 1.0.