Light Source Apparatus Dynamic Positioning for Stable Extraction

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

The stability of light extraction from light source apparatuses is compromised due to vibrations, structural deformations, and material consumption, leading to unstable light emission.

Innovation Solution

A light source apparatus with an input optical system, an output optical system, a target holding unit, an acquiring unit for surface position displacement, and a driving unit controlled by a control unit to adjust the relative positions of optical members and the target holding unit, ensuring stable light extraction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If a target holding unit such as a cylindrical member or a melting pot rotates to supply target material, then the target material can be continuously supplied and consumed, but vibration is caused and relative positions of optical members and target material surface fluctuate

Engineering Contradiction:
Improvetarget material supplyVSAvoidlight extraction stability
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

A position detection unit detects the actual position of the target material surface, and a control unit adjusts the optical members' positions based on this feedback to maintain optimal relative positioning despite vibrations from target material supply operations

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The positions of the first and second optical members are made dynamically adjustable during operation, allowing real-time compensation for vibrations and position fluctuations caused by rotating target holding units

Inventive Principle:
Principle #15Dynamics

2Productivity

If the target holding unit rotates at high speed to improve light output, then productivity increases, but vibration and position fluctuation worsen

Engineering Contradiction:
Improvelight outputVSAvoidposition stability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The position detection unit continuously monitors target material surface position even during high-speed rotation, providing real-time feedback to the control unit which adjusts optical member positions to compensate for increased vibrations

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The optical members' positions are dynamically adjusted in real-time to compensate for the increased vibration and position fluctuation that occurs during high-speed rotation of the target holding unit

Inventive Principle:
Principle #15Dynamics

3Reliability

If the structure is made more rigid to reduce deformation, then position stability improves, but device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improveposition stabilityVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

Rather than making the structure more rigid, the system uses active feedback control where the position detection unit monitors deformations and the control unit adjusts optical member positions to compensate, maintaining stability without increasing structural complexity

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution improves the stability of light extraction by dynamically adjusting the relative positions of optical members and the target holding unit, maintaining consistent light output despite vibrations and material changes.

Implementation Method 1

a target material is formed on the surface of a cylindrical member rotating around a rotation axis and the formed target material is irradiated with excitation light to emit illumination light

Methodology Applied
Scientific EffectLuminescence: Luminescence

Implementation Method 2

a target material, which is molten metal, is held with a centrifugal force on an inner wall of a crucible rotating around a rotation axis

Methodology Applied
Scientific EffectCentrifugal force: Centrifugal Force

Data Source

PatentUS20250102445A1Light source apparatus, inspection apparatus, exposure apparatus, light source control method, inspection method, and exposure method
Publication Date: 2025.03.27 LASERTEC CORP
  • US20250102445A1 patent drawing
  • US20250102445A1 patent drawing
  • US20250102445A1 patent drawing

AI summary

A light source apparatus according to the present disclosure includes an input optical system including a first optical member configured to irradiate a target material with excitation light, an output optical system including a second optical member configured to extract light generated by irradiating the target material with the excitation light, a target holding unit configured to hold the target material, an acquiring unit configured to acquire displacement of a surface position of the target material, a driving unit configured to cause relative positions of an optical member and the target holding unit to vary, the optical member including at least one of the first optical member and the second optical member, and a control unit configured to drive the driving unit based on the displacement.