Light Source Apparatus Dynamic Focus Tracking for Stable Extraction
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Solution Overview
Problem
The stability of light extraction from light source apparatuses is compromised due to vibrations, structural deformations, and material consumption or supplementation during the rotation of target holding units like cylindrical members or crucibles.
Innovation Solution
A light source apparatus is designed with an input optical system, an output optical system, a target holding unit, an acquiring unit for surface position detection, a driving unit for adjusting focusing points, and a control unit that adjusts the driving unit based on the acquired surface position to maintain stable light extraction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a target holding unit such as a cylindrical member or crucible rotates to supply target material, then the target material can be continuously supplied to the light source, but vibration occurs causing fluctuation in relative positions between the light emitting point and optical members, deteriorating light extraction stability
Solution Approach 1:
The patent applies dynamics by making the optical members movable rather than fixed. The first and second optical members are positioned adjustably along the rotation axis direction, allowing them to dynamically track the light emitting point's position changes caused by target material supply and vibration, thereby maintaining stable light extraction despite the rotating target holding unit
Solution Approach 2:
The patent implements feedback control by detecting the position of the light emitting point and using this information to adjust the positions of the optical members. The detection unit monitors the light emitting point position, and this detection feedback drives the positional adjustment of optical members to maintain optimal alignment for stable light extraction
2Productivity
If the target holding unit rotates at high speed to increase productivity, then target material supply efficiency improves, but vibration and structural deformation increase, making it difficult to stably extract light
Solution Approach 1:
The patent enables high-speed rotation for improved productivity while maintaining light extraction stability through dynamic positioning of optical members. The optical members can move along the rotation axis to track the light emitting point's position changes that occur at high rotation speeds, compensating for vibration and deformation effects in real-time
Solution Approach 2:
The feedback mechanism detects light emitting point position changes caused by high-speed rotation and accordingly adjusts optical member positions. This closed-loop control allows the system to maintain stable light extraction even when the target holding unit rotates at high speeds for increased productivity
3Reliability
If the position of the light emitting point is constantly adjusted to maintain stability, then light extraction stability improves, but the complexity of the optical system increases due to additional driving and detection units
Solution Approach 1:
The patent introduces dynamic positioning capability for optical members along the rotation axis direction. This dynamic adjustment mechanism, while adding some complexity, enables the system to track and compensate for light emitting point position changes, significantly improving light extraction stability
Solution Approach 2:
The patent implements a feedback control system using detection units to monitor light emitting point position and driving units to adjust optical member positions accordingly. This feedback mechanism automates the positioning process, improving stability while managing complexity through intelligent control rather than mechanical complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution improves the stability of light extraction by dynamically adjusting the focusing points of optical members in response to surface position fluctuations, thereby enhancing the reliability of light source apparatuses used in inspection and exposure applications.
Implementation Method 1
an acquiring unit that acquires a surface position of the target material
Implementation Method 2
a driving unit that causes a position of a focusing point of at least one of the first optical member and the second optical member to vary
Implementation Method 3
the target holding unit may include a container, which houses the target material on an inside, and support the target material on an inner wall surface of the container with a centrifugal force
Implementation Method 4
an output optical system including a second optical member configured to extract light generated by irradiating the target material with the excitation light
Data Source
AI summary
A light source apparatus according to the present disclosure includes an input optical system including a first optical member configured to irradiate a target material with excitation light, an output optical system including a second optical member configured to extract light generated by irradiating the target material with the excitation light, a target holding unit configured to hold the target material, an acquiring unit configured to acquire a surface position of the target material, a driving unit configured to cause a position of a focusing point of at least one of the first optical member and the second optical member to vary, and a control unit configured to drive the driving unit based on the surface position.