Light Source Holder Geometry for Accurate Target Material Sensing
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Solution Overview
Problem
Existing light source apparatuses face challenges in accurately determining the amount of target material held in the target holding unit, which affects the stability and efficiency of illumination light generation.
Innovation Solution
The apparatus includes a target holding unit with distinct regions of varying depths and a camera-based acquisition system to image the holding surface, allowing for precise determination of the target material's amount based on the occupied regions and their coverage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a target material is held in a target holding unit (cylindrical member or crucible), then illumination light can be generated through light extraction, but it becomes difficult to easily acquire the amount of target material held
Solution Approach 1:
The holding surface is divided into multiple regions with different depths (first region, second region, third region). By segmenting the holding surface into distinct depth zones, the system can determine the amount of target material by identifying which regions are occupied, providing easy measurement without complex additional devices.
Solution Approach 2:
The patent introduces a depth dimension to the holding surface by creating regions at different depths. This dimensional variation allows the amount of target material to be inferred from the vertical distribution pattern across multiple depth levels, transforming a one-dimensional measurement problem into a multi-dimensional solution.
2Reliability
If the target material amount changes due to consumption and supply, then stable illumination light extraction is affected, but existing systems lack easy monitoring capability
Solution Approach 1:
The system provides feedback on the target material amount by detecting which depth regions are occupied. This feedback mechanism allows real-time monitoring of target material levels, enabling stable illumination light extraction by maintaining appropriate material levels through continuous observation and adjustment.
Solution Approach 2:
The holding surface is pre-structured with multiple depth regions before target material is supplied. This preliminary configuration of the holding surface enables subsequent easy monitoring of material amounts by simply detecting which pre-defined regions are occupied, rather than requiring complex measurement systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy and accurate acquisition of the target material's amount, stabilizing illumination light generation and enhancing the efficiency of the light source apparatus.
Implementation Method 1
an acquisition unit configured to acquire state information of the holding surface
Implementation Method 2
a formation unit including a condenser lens that focuses excitation light forming plasma by exciting the target material
Implementation Method 3
excitation light forming plasma by exciting the target material on the target material
Implementation Method 4
irradiates the formed target material with excitation light, thereby extracting illumination light
Data Source
AI summary
A light source apparatus according to the present disclosure includes: a target holding unit having a holding surface for holding a target material for generating light; and an acquisition unit configured to acquire state information of the holding surface, in which the holding surface includes a first region and a second region, a depth of the first region from a predetermined surface is greater than that of the second region, the target material is held in the first region when the amount of the target material is a first amount, the target material is held in the first region and the second region when the amount of the target material is a second amount greater than the first amount, and the acquisition unit acquires the amount of the target material based on a region in which the target material occupies the holding surface in the acquired state information.