Light-Transmitting Imprint Mold for Large-Area Nano-Patterning
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Solution Overview
Problem
Existing methods for creating large-area molds with nano-scale fine concave-convex patterns are costly due to the need for high accuracy alignment, which can result in non-continuous patterns if alignment is low, and require expensive imprint apparatuses.
Innovation Solution
A light-transmitting imprint mold with a transparent substrate and a light shielding member that covers the concave-convex pattern, allowing for semi-curing of photo curing resin in the light shielding region, enabling deformation into a continuous reverse pattern without high alignment accuracy, using a relatively affordable imprint apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a small mold is used for imprint and repeated by shifting position (step and repeat), then large-area imprint can be achieved, but alignment accuracy must be extremely high and the apparatus becomes very expensive
Solution Approach 1:
The light shielding member is provided in advance on the mold to define a light shielding region. This preliminary structure enables the resin to be semi-cured in specific areas before the next imprint step, creating a buffer zone that tolerates alignment variations without destroying previously formed patterns.
Solution Approach 2:
The light shielding member acts as an intermediary element between the mold pattern and the resin. By controlling light exposure through this intermediary, the resin in the light shielding region is semi-cured, maintaining profile while allowing deformation, thus mediating between the need for pattern fidelity and alignment tolerance.
2Ease of manufacture
If alignment accuracy is low, then the apparatus cost is reduced, but the concave-convex pattern already formed can be destroyed and non-continuous patterns result
Solution Approach 1:
The mold is divided into different regions with different properties: the light transmitting region for forming new patterns and the light shielding region for maintaining previously formed patterns. This local differentiation allows the light shielding region to be semi-cured, preserving its profile while allowing it to deform sufficiently to accommodate alignment variations, thus maintaining pattern continuity without requiring high alignment accuracy.
3Manufacturing precision
If the light shielding member covers the concave-convex pattern with surface profile reproduction, then the resin profile is maintained during semi-curing, but the mold structure becomes more complex
Solution Approach 1:
The light shielding member is integrated directly onto the mold substrate, merging the light shielding function with the mold structure. The surface profile of the light shielding member reproduces the concave-convex pattern, combining pattern formation and light shielding into a single integrated component rather than separate elements, thus reducing overall system complexity while maintaining profile fidelity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the formation of continuous concave-convex patterns with reduced alignment requirements, using a cost-effective imprint method that maintains the pattern profile by semi-curing the resin, allowing for efficient large-area mold production.
Implementation Method 1
a light shielding member provided on the patterned region; wherein the light shielding member is provided at an edge portion of the patterned region so as to cover the concave-convex pattern
Implementation Method 2
a transparent substrate having a patterned region onto which a concave-convex pattern is formed
Data Source
Figure 1(a)~1(b)
Figure 2(a)~2(b)
Figure 3(a)~3(c)
AI summary
An imprint method including the steps of: an exposing step to irradiate a photo curing resin, coated on a large-area substrate, with a curing light while the light-transmitting imprint mold is pressed against the photo curing resin, an amount of the curing light applied onto the photo curing resin in a light shielding region provided with the light shielding member (5) made less than an amount of the curing light applied onto the photo curing resin in a light transmitting region of the mold so that a portion of the photo curing resin in the light shielding region is semi-cured by the use of the light shielding member (5) provided so as to reproduce the concave-convex pattern of the transparent substrate; a separating step to separate the mold from the photo curing resin after the exposing step; a moving step to move the mold so that an end of the light transmitting region of the mold is positioned on the semi-cured portion (9b) of the photo curing resin; and a repeating step to repeat the exposing step and the separating step with the mold positioned at a position after the moving step.