LINAC Resonator Synchronization Using a Digital Master Clock

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Solution Overview

Problem

Maintaining resonance across multiple stages of a linear accelerator in ion implantation systems is challenging due to the need for precise control of RF resonators, which is difficult to achieve with existing technologies.

Innovation Solution

A global control module with a digital master clock generator and master waveform generator, coupled with resonator control modules that include synchronization modules to adjust phase delays and maintain resonance accuracy across multiple stages.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If multiple independent resonators are used to control multiple stages of a LINAC, then the ability to accelerate ion beams through multiple stages is improved, but the difficulty of maintaining resonance across all stages increases due to the need for precise nanosecond-level synchronization

Engineering Contradiction:
Improveion beam acceleration capabilityVSAvoidresonator control synchronization
Core Design Contradiction:
PowerVSDevice complexity

Solution Approach 1:

The patent combines multiple independent resonator control functions into a unified control system where a master resonator generates a reference signal that synchronizes all slave resonators. This merging of control functions reduces the overall system complexity while maintaining the ability to accelerate ion beams through multiple stages, as the synchronized resonators work together under a single coordination framework rather than requiring independent nanosecond-level adjustment of each resonator

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent implements feedback mechanisms where the phase and frequency of each resonator are continuously monitored and adjusted based on the master resonator's reference signal. This feedback loop ensures that all resonators maintain resonance conditions simultaneously, addressing the synchronization challenge by automatically correcting phase deviations rather than requiring manual precise adjustment of each resonator

Inventive Principle:
Principle #23Feedback

2Manufacturing precision

If precise control of RF resonators is implemented to maintain resonance, then the resonance maintenance accuracy is improved, but the control system complexity and difficulty of operation increase

Engineering Contradiction:
Improveresonance maintenance accuracyVSAvoidresonator control operation
Core Design Contradiction:
Manufacturing precisionVSEase of operation

Solution Approach 1:

The master resonator automatically generates reference signals and provides synchronization to all slave resonators without requiring external manual adjustment. The system serves itself by using the master resonator's output as the reference standard, eliminating the need for operators to manually coordinate multiple resonators with nanosecond precision while maintaining high resonance accuracy

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The master resonator performs multiple functions: it generates RF power for its own stage, provides reference signals for synchronizing all other resonators, and serves as the frequency standard for the entire LINAC system. This multi-functionality reduces operational complexity by consolidating control functions into a single device rather than requiring separate control mechanisms for each resonator

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution ensures precise control and maintenance of resonance across multiple stages, enhancing the ability to accelerate ion beams and delivering high energy ions efficiently.

Implementation Method 1

A phase locked loop (PLL) 320 may be employed to produce a digital master clock signal 211 and a master waveform signal 201

Methodology Applied
Scientific EffectPhase Locked Loop (PLL):

Implementation Method 2

A given stage of the LINAC is used to increase ion energy by accelerating ions using, for example, a resonator generating an RF voltage that is applied to a given electrode or set of electrodes at the given stage. The RF voltage generates an oscillating electric field that is coupled into an ion beam being conducted through the LINAC

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentUS12193140B2Controller and control techniques for linear accelerator and ion implanter having linear accelarator
Publication Date: 2025.01.07 APPLIED MATERIALS INC
  • US12193140B2 patent drawing
  • US12193140B2 patent drawing
  • US12193140B2 patent drawing

AI summary

An apparatus may include global control module, the global control module including a digital master clock generator and a master waveform generator. The apparatus may also include a plurality of resonator control modules, coupled to the global control module. A given resonator control module of the plurality of resonator control modules may include a synchronization module, having a first input coupled to receive a resonator output voltage pickup signal from a local resonator, a second input coupled to receive a digital master clock signal from the digital master clock generator, and a first output coupled to send a delay signal to the master waveform generator.