Linear Array Magnetic Scanning for Fast Domain Uniformity Detection
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Solution Overview
Problem
Existing magnetic thin film layer scanning methods, such as dot matrix scanning, are cumbersome and time-consuming due to the need for reciprocating magnetic fields and lack of full coverage, leading to inefficient scanning processes.
Innovation Solution
A linear array scanning device utilizing a gradient magnetic field and linearly polarized light to simplify the scanning process by enabling one-time scanning for magnetic domain uniformity information acquisition, with components like magnetic field generation, light splitting, and detection assemblies to enhance scanning efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If dot matrix scanning is used to detect magnetic thin film layers, then discrete point measurements can be obtained, but the scanning process becomes cumbersome and time-consuming
Solution Approach 1:
The patent divides the scanning task into multiple linear arrays that can be scanned simultaneously. Instead of scanning discrete points sequentially as in dot matrix scanning, the detection area is segmented into multiple linear arrays along the radial direction, allowing parallel acquisition of magnetic domain information from multiple regions, thereby significantly reducing scanning time while maintaining measurement precision
Solution Approach 2:
The patent transitions from two-dimensional dot matrix scanning to one-dimensional linear array scanning. By projecting light along the radial direction and detecting magnetic domain information along a linear array, the system reduces the scanning dimension from 2D to 1D, enabling faster acquisition of magnetic domain uniformity information across the wafer surface
2Measurement precision
If reciprocating varying magnetic field is established for scanning, then magnetic domain information can be obtained, but the scanning process becomes overly cumbersome
Solution Approach 1:
The patent applies a gradient magnetic field in advance to uniformly magnetize the magnetic thin film layer before scanning. This preliminary magnetization action aligns the magnetic domains in a consistent direction, simplifying the subsequent scanning process. The linear array then scans the pre-magnetized regions directly without requiring reciprocating varying magnetic fields, reducing process complexity while maintaining measurement precision
Solution Approach 2:
The patent replaces the complex mechanical reciprocating varying magnetic field system with a simpler gradient magnetic field generation system combined with linear array scanning. Instead of using mechanical reciprocation to vary the magnetic field, the system uses a gradient magnetic field to uniformly magnetize the sample and then scans with a linear array, substituting a complex mechanical-magnetic system with a simpler optical-magnetic approach
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution allows for rapid acquisition of magnetic domain uniformity information by one-time scanning, significantly reducing scanning time and improving efficiency by eliminating the need for varying magnetic field intensity changes during the scanning process.
Implementation Method 1
The first magnetic field generation assembly includes two groups of first magnetic assemblies disposed opposite to each other and is configured to generate a first gradient magnetic field
Implementation Method 2
The light source assembly is configured to output linearly polarized light... detect polarization information of the first reflected linearly polarized light
Implementation Method 3
detect polarization information of the first reflected linearly polarized light... and acquire magnetic domain uniformity information of the to-be-detected magnetic sample
Data Source
AI summary
A linear array scanning device includes: an object carrying assembly configured to carry a to-be-detected magnetic sample; a first magnetic field generation assembly configured to generate a first gradient magnetic field; a light source assembly configured to output linearly polarized light; a first light splitting assembly disposed on an emergent light path of the light source assembly and is configured to receive the linearly polarized light, split the linearly polarized light into multiple first sub-linearly polarized light, and project first sub-linearly polarized light propagating along a first direction to a first detection region of the to-be-detected magnetic sample; and a first detection assembly configured to receive first reflected linearly polarized light reflected back from the first detection region, detect polarization information of the first reflected linearly polarized light, and acquire magnetic domain uniformity information of the to-be-detected magnetic sample.