Linear Evaporation Source Uniform Heat Distribution Cover
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Solution Overview
Problem
Existing linear evaporation sources face challenges in achieving uniform temperature distribution and deposition thickness due to non-uniform heat distribution and environmental constraints, leading to inefficiencies in the deposition process for flat panel displays like OLEDs.
Innovation Solution
A linear evaporation source design incorporating a uniform heat distribution cover, heat conduction prevention members, heat loss prevention members, and a leakage prevention connector to ensure uniform temperature distribution and prevent heat loss, while maintaining airtightness and uniform discharge of deposition materials.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single rectangular parallelepiped box structure is used for the linear evaporation source, then the device structure is simple, but the temperature distribution is non-uniform and the spray amount varies across different portions
Solution Approach 1:
The linear evaporation source is divided into multiple independent heating zones along its length, with each zone capable of independent temperature control. This segmentation allows uniform temperature distribution across the deposition area, resolving the contradiction between simple structure and uniform deposition thickness.
Solution Approach 2:
Different portions of the linear evaporation source are equipped with locally optimized heating elements and insulation properties tailored to their specific thermal requirements. This local quality approach ensures uniform temperature distribution while maintaining overall structural simplicity.
2Manufacturing precision
If nozzle tuning process is used to adjust spray amount, then the deposition thickness can be adjusted, but the process cannot be performed in vacuum state and requires multiple nozzles with different diameters
Solution Approach 1:
The mechanical nozzle tuning process is replaced with a field-based control system that adjusts spray amount through electromagnetic or thermal fields in vacuum-compatible environments. This eliminates the need for physical nozzle replacement while maintaining precise deposition thickness control.
Solution Approach 2:
The spray amount is controlled by dynamically changing operational parameters such as heating power, deposition time, or material feed rate rather than physically adjusting nozzle diameters. This parameter-based control enables vacuum-compatible operation and eliminates the need for multiple nozzle types.
3Loss of energy
If heat conduction prevention member is added between crucible and accommodation case, then heat insulation performance is improved, but the device structure becomes more complex
Solution Approach 1:
A heat conduction prevention member acts as an intermediary thermal insulation layer between the crucible and accommodation case. This mediator component effectively reduces heat loss while adding minimal structural complexity, as it is a standardized insulation element.
4Manufacturing precision
If heat loss prevention member is added between uniform heat distribution cover and accommodation case, then heat distribution uniformity is improved, but the device structure becomes more complex
Solution Approach 1:
A heat loss prevention member serves as a thermal insulation intermediary between the uniform heat distribution cover and accommodation case. This component maintains temperature distribution uniformity by preventing heat loss to the accommodation case, with minimal impact on overall structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables uniform deposition thickness on a substrate by ensuring consistent temperature and air pressure across the deposition area, improving the efficiency and quality of the deposition process.
Implementation Method 1
uniform heat distribution cover configured to cover the accommodation case to uniformly distribute a temperature by receiving heat from the crucible
Implementation Method 2
heat conduction prevention member is provided between a crucible and an accommodation case to prevent heat of the crucible from being conducted to the accommodation case
Implementation Method 3
heat loss prevention member is provided between a uniform heat distribution cover and an accommodation case to prevent heat of the uniform heat distribution cover from being conducted to the accommodation case
Data Source
AI summary
The present invention provides a linear evaporation source which receives heat from a crucible such that heat is uniformly distributed while a uniform heat distribution cover is seated on an accommodation case. The provided linear evaporation source includes an accommodation case forming an accommodation space with an open upper side, a crucible accommodated in the accommodation space and configured to discharge a deposition material, and a uniform heat distribution cover configured to cover the accommodation case to uniformly distribute a temperature by receiving heat from the crucible.