Linear Guide With Integrated Motor And Electromagnetic Positioning
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Solution Overview
Problem
Existing linear guides with integrated motors lack the necessary rigidity and accuracy for precise positioning transversely to the guide direction, especially in microelectronics applications where precise and low-friction mounting is required, as air-bearing guides are not sufficiently rigid to correct path deviations effectively.
Innovation Solution
A linear guide with an integrated ironless linear motor and non-contact bearings, featuring electromagnetic interaction for transverse positioning, along with an integrated position measuring system using a scale and scanning heads to detect and correct deviations, allowing for precise positioning in both the guide direction and transverse direction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If air-bearing linear guides are used for low-friction mounting, then friction is reduced and positioning speed is improved, but transverse rigidity deteriorates and positioning accuracy transversely to the guide direction worsens
Solution Approach 1:
The patent combines air-bearing technology with electromagnetic positioning technology into a hybrid system. The air bearing provides low-friction support while electromagnetic actuators actively correct transverse deviations, merging the advantages of both contactless support and active positioning control.
Solution Approach 2:
The system uses sensors to detect transverse position deviations and feeds this information back to electromagnetic actuators that actively compensate for deviations. This closed-loop feedback control maintains transverse positioning accuracy while preserving the low-friction benefits of air bearings.
2Manufacturing precision
If conventional linear guides with contact are used, then transverse rigidity is improved and positioning accuracy is maintained, but friction increases and wear occurs
Solution Approach 1:
The patent replaces mechanical contact-based positioning with a hybrid system where air bearings provide support without contact and electromagnetic actuators provide active transverse positioning. This substitution eliminates mechanical wear and friction while maintaining positioning accuracy through active control.
Solution Approach 2:
The system uses air bearings to provide contactless support, replacing mechanical contact with pneumatic cushioning. This eliminates friction and wear associated with conventional mechanical guides while maintaining the necessary support and positioning capabilities.
3Manufacturing precision
If electromagnetic positioning means are added to air-bearing guides, then transverse positioning capability is improved, but system complexity increases
Solution Approach 1:
The patent designs the air-bearing platform to serve multiple functions: it provides low-friction support, acts as a mounting base for electromagnetic actuators, and serves as the moving element for transverse positioning. This multi-functionality reduces overall system complexity despite adding electromagnetic positioning capabilities.
Solution Approach 2:
The system merges the support function of air bearings with the positioning function of electromagnetic actuators into a unified platform. By combining these functions on a single integrated structure, the patent avoids the complexity of separate independent systems while achieving both low-friction operation and active transverse positioning.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables very precise positioning with the ability to compensate for guide errors transverse to the guide direction, independent of guide rail quality or wear, and suitable for clean room applications without abrasion, offering three degrees of freedom for precise alignment and correction.
Implementation Method 1
a linear motor (3) whose movable part (3.1, 3.3) is connected to the table (2) and whose stationary part (1, 3.2) is connected to the carrier (1)... with means based on electromagnetic interaction for positioning the table (2) transversely to the guide direction
Implementation Method 2
non-contact bearings (7) between the carrier (1) and the table (2)... in which the moving part is kept at a distance from the stationary part by an air cushion
Implementation Method 3
means based on electromagnetic interaction for positioning the table (2) transversely to the guide direction
Data Source
Figure 1~2
Figure 3
Figure 4
AI summary
A linear guide with an integrated linear motor comprises a stationary support (1) extending in the guide direction (X), a table (2) movable in the guide direction (X), and a linear motor (3) whose movable part (3.1) is connected to the table (2) and whose stationary part (3.2) is connected to the support (1). The linear guide also includes non-contact bearings (7) between the support (1) and the table (2), as well as electromagnetic interaction means (6) for positioning the table (2) transversely to the guide direction (X). Furthermore, the linear guide has an integrated position measuring system with a scale (4) and scanning heads (5.1, 5.2) with which the position of the table (2) can be detected both in the guide direction (X) and in a deviation direction (Y) that is transverse to the guide direction (X) and parallel to a plane of an air gap (3.4) of the linear motor (3).The means (6) act in such a way that the table (2) is positioned in the direction of deviation (Y).