Linear Guide Side Seal Member for Clean Room Dust Control

The side seal member is divided into multiple stacked plates (first plate, second plate, third plate) with different clearance characteristics. The first plate has a smaller clearance to capture fine particles, while the second and third plates have progressively larger clearances. This segmentation allows each plate to perform a specific function in the particle capture sequence, effectively reducing dust generation while maintaining manageable clearance through the staged filtration approach.

The side seal member employs plates with locally optimized clearance characteristics. The first plate has a smaller clearance specifically positioned to capture fine particles, while subsequent plates have progressively larger clearances. This local quality optimization allows the seal member to be effective at particle capture without requiring uniform thickness throughout, thereby preserving slider movement space while reducing fine particle escape.

The side seal member uses asymmetric plate configurations where each plate has different clearance characteristics relative to the guide rail. The first plate is positioned closer to the guide rail with smaller clearance, while the second and third plates are progressively farther away with larger clearances. This asymmetric arrangement creates an efficient particle capture gradient without requiring complex mechanical structures, thereby reducing dust generation while limiting device complexity growth.