Linear Injector Configuration for Vertical Heat Treatment
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Solution Overview
Problem
Conventional heat treatment apparatuses face limitations in reducing the pitch between injectors due to the need for O-rings and thread-engaging mechanisms, which restrict the number of injectors that can be installed, especially in vertical type heat treatment processes requiring uniform gas supply to multiple substrates.
Innovation Solution
A processing apparatus with a manifold having an injector supporting part and a gas introduction part that allows for a linear injector configuration without an L-shape, enabling a smaller pitch between injectors and increased installation capacity by eliminating the need for thick horizontal portions and thread-engaging mechanisms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an L-shaped injector with thread-engaging mechanism and O-ring is used, then hermetic gas introduction is achieved, but the pitch between injectors increases and the number of injectors is limited to about nine
Solution Approach 1:
The patent extracts and eliminates the L-shaped horizontal portion of the injector that extended into the processing container. By removing this protruding structure, the pitch between injectors is reduced, allowing approximately two times more injectors to be installed. The gas introduction function is maintained through a simplified linear injector configuration where the gas supply passage is positioned at the lower end of the injector rather than requiring a horizontal extension.
Solution Approach 2:
The patent inverts the conventional injector configuration by positioning the gas supply passage at the lower end of the injector rather than having the injector extend horizontally from the wall. This inversion allows the injector to be installed in a more compact arrangement, reducing the pitch between adjacent injectors while maintaining hermetic sealing through the O-ring at the connection interface.
2Reliability
If a thread-engaging mechanism similar to bolt and nut is used, then hermetic connection is achieved, but the device complexity increases and installation space is required
Solution Approach 1:
The patent extracts and removes the thread-engaging mechanism (bolt and nut) from the connection structure. Instead of using threaded fasteners, the gas pipe is directly fitted into the gas introduction passage with an O-ring providing hermetic sealing. This simplification eliminates the complexity of thread engagement while maintaining reliable gas-tight connection, and reduces the space required for installation.
3Strength
If the horizontal portion of the injector is thickened to secure strength, then structural strength is improved, but the pitch between injectors cannot be reduced
Solution Approach 1:
The patent removes the horizontal portion of the injector entirely, retaining only the vertical linear section. This eliminates the need to thicken any horizontal structure for strength, as the injector now follows a simplified path from the gas pipe at the lower end to the processing container interior. The structural strength is maintained through the vertical configuration without requiring increased thickness that would prevent pitch reduction.
Data Source
AI summary
A processing apparatus includes a processing container, a manifold having an injector supporting part, the injector supporting part being disposed at a lower end of the processing container, extending along an inner wall surface in the processing container and having an insertion hole, and a gas introduction part having a gas flow passage within the gas introduction part to communicate with the insertion hole and an outside of the processing container so that a gas flows in the gas flow passage, an injector inserted and fixed into the insertion hole, the injector entirely extending in a linear manner along the wall surface and having an opening communicating with the gas flow passage at a location where the injector is inserted into the insertion hole, and a gas supplying pipe communicating with and connected to an outer end of the gas flow passage of the gas introduction part.