Linear Motor Carrier Conveyance for High-Speed Film Formation
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Solution Overview
Problem
Conventional in-line film forming apparatuses face challenges in conveying carriers at high speeds, maintaining a high vacuum degree, and preventing carrier vibration and bearing-related issues, which limit the production capacity and quality of magnetic recording media.
Innovation Solution
An in-line film forming apparatus with a linear motor drive mechanism, horizontal and vertical guide mechanisms using bearings with damping members, and sensors to maintain a non-contact state and reduce load on bearings, allowing high-speed carrier conveyance while ensuring a high vacuum degree.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a rotary magnet is used to convey the carrier, then the carrier can be conveyed without contact, but the carrier may be lifted upward or pushed against bearings causing vibration and movement deterioration
Solution Approach 1:
The patent replaces the rotary magnet mechanical system with a linear motor system that uses electromagnetic force to convey the carrier. The linear motor applies force directly to the carrier in the horizontal direction without the rotational lifting/pushing actions that cause vibration, thus improving conveyance stability while maintaining smooth movement.
Solution Approach 2:
The patent introduces a non-contact guide mechanism using magnetic fields as an intermediary between the drive mechanism and the carrier. This magnetic guidance system provides horizontal guidance without physical contact, eliminating the vibration and movement deterioration caused by bearing contact while maintaining conveyance stability.
2Reliability
If the number of bearings holding the carrier is increased to prevent upward movement, then the carrier can be guided better, but movement of the carrier may worsen and the degree of vacuum may deteriorate due to degassing
Solution Approach 1:
The patent replaces the mechanical bearing support system with a magnetic field-based non-contact guidance system. This eliminates the need for multiple bearings that cause degassing and movement deterioration, while still providing accurate horizontal guidance for the carrier through magnetic forces.
3Productivity
If the rotary magnet and drive mechanism are arranged in the lower portion of the film forming chamber, then the carrier can be driven, but they may cover the exhaust pipe obstructing vacuum pump exhaust
Solution Approach 1:
The patent replaces the rotary magnet drive mechanism with a linear motor system that can be mounted on the side walls or ceiling of the film forming chamber rather than the lower portion. This spatial reconfiguration allows the exhaust pipes to remain uncovered and functional, maintaining vacuum pump efficiency while preserving carrier conveyance capability.
4Productivity
If the rotating speed of the rotary magnet is increased to enhance production capacity, then conveyance speed improves, but the mechanism has a limit on increasing rotating speed
Solution Approach 1:
The patent replaces the rotary magnet system with a linear motor system that achieves carrier conveyance through linear electromagnetic force rather than rotation. This eliminates the rotational speed limits of the rotary magnet, allowing for higher and more flexible carrier conveyance speeds to enhance production capacity.
5Reliability
If bearings are used to guide the carrier, then the carrier can be prevented from moving, but it is difficult to use fluid lubricant in vacuum causing rotation characteristic to worsen under large load
Solution Approach 1:
The patent replaces the mechanical bearing guidance system with a magnetic field-based non-contact guidance system. This eliminates the need for fluid lubricants that cannot function in vacuum, maintaining excellent rotation characteristics and guidance effectiveness under large loads without the limitations of lubrication in vacuum environments.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-speed carrier conveyance, enhanced exhaust capability, and easy realization of a high vacuum, thereby improving the manufacturing capacity and quality of magnetic recording media.
Implementation Method 1
a conveyor mechanism which sequentially conveys the carrier through the plurality of film forming chambers. The conveyor mechanism has a linear motor drive mechanism which drives the carrier in a noncontact state
Implementation Method 2
The horizontal guide mechanism or the vertical guide mechanism has a plurality of bearings rotatably attached to a plurality of shafts arranged in a conveying direction of the carrier via a damping member, and the noncontact state between the shafts and the bearings is maintained via the damping member
Data Source
AI summary
An in-line film forming apparatus capable of conveying a carrier at a high speed, increasing the exhaust capability within a film forming chamber, and easily realizing a high vacuum degree in a short time is provided. A conveyor mechanism has a linear motor drive mechanism which drives the carrier in a noncontact state, a horizontal guide mechanism which is provided so as to be able to contact a side portion of the carrier, and guides the carrier driven by the linear motor drive mechanism in a horizontal direction, and a vertical guide mechanism which is provided so as to be able to contact a lower end of the carrier, and guides the carrier driven by the linear motor drive mechanism in the vertical direction.