Linear Motor Cooling Jacket Temperature Control
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Solution Overview
Problem
Conventional temperature control systems for linear motors in precision positioning systems, such as semiconductor exposure apparatuses, face challenges in minimizing temperature unevenness and air fluctuations that affect laser interferometer measurements, leading to positioning errors, while existing solutions compromise on precision or motor efficiency.
Innovation Solution
A simple temperature control system is implemented using a film-like heater adhered to the surface of the cooling jacket, allowing independent control of heat generation along the jacket surface, with a temperature measuring device to maintain surface temperature uniformity, and a control system to predict and adjust heat generation based on drive control outputs, minimizing air fluctuations without reducing motor efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a cooling medium flows through the clearance between the coil and jackets to collect heat, then heat is transferred away from the coil and temperature unevenness is reduced, but the structure becomes complex and motor efficiency decreases
Solution Approach 1:
The patent extracts the temperature control function from the motor structure by providing a separate temperature control device that is positioned apart from the motor. This allows the motor to focus on its primary function of generating driving force while the separate device handles temperature control, thereby simplifying the motor structure and avoiding complexity in the motor design.
Solution Approach 2:
The patent introduces a temperature control device as an intermediary component between the heat-generating coil and the surrounding environment. This intermediary device controls the temperature of the coil by providing or absorbing heat as needed, without requiring direct integration of complex cooling channels within the motor structure itself.
2Temperature
If a cooling medium flows through the clearance between the coil and jackets to collect heat, then heat is transferred away from the coil, but linear motor efficiency is reduced
Solution Approach 1:
The patent extracts the temperature control function from the motor structure by providing a separate temperature control device that is positioned apart from the motor. This allows the motor to focus on its primary function of generating driving force while the separate device handles temperature control, thereby simplifying the motor structure and avoiding complexity in the motor design.
Solution Approach 2:
The temperature control device operates independently to manage the thermal state of the coil based on actual temperature conditions. By using temperature detection means to monitor the coil temperature and adjusting heat input or removal accordingly, the system achieves self-regulated temperature control that maintains motor efficiency while preventing overheating.
3Measurement precision
If space is carefully designed to avoid heat generating members near the interferometer optical axis, then air fluctuation is reduced, but the positioning system becomes more complex
Solution Approach 1:
The patent extracts the temperature control function from the motor structure by providing a separate temperature control device that is positioned apart from the motor. This allows the motor to focus on its primary function of generating driving force while the separate device handles temperature control, thereby simplifying the motor structure and avoiding complexity in the motor design.
Solution Approach 2:
The patent employs feedback control by using temperature detection means to monitor the temperature of structural members near the optical axis and adjusting the operation of the temperature control device accordingly. This feedback mechanism allows the system to maintain temperature stability and reduce air fluctuation without requiring overly complex spatial design, as the control adapts to actual temperature conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces temperature unevenness and air fluctuations, enhancing positioning precision and reducing measurement errors in interferometric gauges without sacrificing linear motor efficiency.
Implementation Method 1
a heater (11) which generates heat
Implementation Method 2
a cooling medium (8) which exchanges heat with the coil (5a)
Implementation Method 3
an interferometer (4) having a measurement light path (4a)
Data Source
AI summary
A positioning system includes a stage configured to move while carrying an object thereon, an interferometer configured to measure a position of the stage, a driving unit configured to drive the stage, a heater provided between a light path of the interferometer and a coil which is a component element of the driving unit, and a cooling jacket configured to cover the coil and to circulate a cooling medium therein. The heater is provided on a surface of the cooling jacket.