Phase-Compensated Wireless Power Control for Linear Motors
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Solution Overview
Problem
The existing wireless power transmission systems for driving linear motors in semiconductor exposure apparatuses face challenges due to phase differences between the control voltage and the current output, leading to delayed motor operation and reduced control accuracy.
Innovation Solution
The implementation of a phase compensator that adjusts the phase difference between the control voltage and the current output, ensuring the current output from the wireless power transmission system aligns with the control voltage, thereby minimizing delays and improving control speed and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If wireless power transmission is used to eliminate cables, then ease of operation and device simplicity are improved, but phase difference between control voltage and current output increases, reducing control accuracy
Solution Approach 1:
A phase compensator is introduced as an intermediary device between the wireless power transmission system and the linear motor. The phase compensator receives the control voltage, adjusts its phase, and outputs the corrected voltage to drive the motor, thereby compensating for the phase difference caused by wireless transmission and restoring control accuracy
Solution Approach 2:
The phase compensator dynamically adjusts the phase parameter of the control voltage to counteract the phase shift introduced by wireless power transmission. By changing the phase parameter in real-time, the system maintains accurate control despite the wireless transmission medium
2Device complexity
If wireless power transmission is used to eliminate cables, then device complexity is reduced, but control speed decreases due to phase delay
Solution Approach 1:
The phase compensator performs preliminary phase adjustment on the control voltage before it reaches the linear motor. By anticipating and correcting the phase delay in advance, the system ensures that the motor receives properly phased voltage signals, maintaining fast response times despite wireless transmission
3Measurement precision
If phase compensator is added to correct phase difference, then control accuracy is improved, but device complexity increases
Solution Approach 1:
The phase compensator uses electronic signal processing to adjust phase, replacing what would otherwise require complex mechanical synchronization systems. This electronic approach achieves high control accuracy with relatively simple circuitry, minimizing the increase in overall device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The phase compensator effectively reduces the phase difference between the control voltage and the current output, enhancing the control speed and accuracy of the motor operation, making the wireless power transmission system comparable to wired systems in performance.
Implementation Method 1
power is supplied to a linear motor to drive the liner motor... wireless transmission of the power for driving the motor is considered
Data Source
Figure 1
Figure 2A~2B
Figure 3
AI summary
A control apparatus (310) includes a driver (100) that outputs power based on a first control signal; a wireless power transmission system (200) that is connected downstream of the driver (100), that receives first power, and that supplies second power to a motor through wireless power transmission; and a compensator (300) that compensates a difference between a phase of the first control signal and a phase of current output from the wireless power transmission system (200).