Linear Pushing Mechanism for Substrate Attachment and Detachment
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Solution Overview
Problem
Existing substrate holding devices face challenges in securely attaching and detaching large, thin substrates due to bending issues and lack of automation, and are prone to scratching or breaking when processing warped or thin substrates.
Innovation Solution
A substrate attachment/detachment device with first and second retaining members that can hold substrates in multiple postures, allowing for linear motion and orthogonal locking to securely clamp and release substrates of varying dimensions and thicknesses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a ferrule is rotated to engage with a damper to lock the substrate, then the substrate is secured onto the holder, but large thin substrates are bent by the rotation motion
Solution Approach 1:
The patent replaces the rotational ferrule engagement mechanism with a linear pushing mechanism. The pushing member linearly pushes the retaining member in the clamping direction to engage the clamping tooth with the substrate, eliminating rotational motion that causes bending of thin substrates while achieving reliable locking.
Solution Approach 2:
The patent introduces a pushing member as an intermediary between the actuator and the retaining member. This pushing member translates the actuator's motion into linear pushing action on the retaining member, mediating the force transmission to avoid direct rotational contact with the substrate.
2Reliability
If blocks are screwed together to lock the substrate by means of grippers, then the substrate is securely held, but automation of the holding process becomes difficult
Solution Approach 1:
The patent replaces the manual screw-together mechanism with an automated actuating mechanism. The actuator automatically drives the pushing member to linearly push the retaining member, enabling automated engagement of the clamping tooth with the substrate without requiring manual screwing operations.
Solution Approach 2:
The patent designs the retaining member with a resilient body that automatically engages the clamping tooth with the substrate when pushed in the clamping direction. The resilient nature allows automatic locking without requiring precise manual alignment or multiple adjustment steps, facilitating automation.
3Device complexity
If the substrate is carried with the to-be-processed face facing upward, then the device can be downsized without complicated posture changing mechanisms, but thin warped substrates are liable to get scratches or breakage
Solution Approach 1:
The patent applies localized support through the resilient body of the retaining member that contacts only the peripheral portion of the substrate. This localized support prevents warping and surface damage of thin substrates during horizontal carrying, while maintaining the simplified horizontal posture configuration without complex posture changing mechanisms.
Solution Approach 2:
The resilient body of the retaining member provides beforehand cushioning by elastically deforming to accommodate and support the substrate before any potential damage can occur. This pre-cushioning effect protects thin warped substrates from scratches or breakage during the carrying process.
4Area of stationary object
If the substrate holder size is increased to accommodate large substrates, then large substrates can be held, but the weight of the holder increases making attachment and detachment difficult
Solution Approach 1:
The patent replaces complex manual attachment and detachment operations with an automated actuating system. The actuator automatically drives the pushing member to engage the retaining member with the substrate, eliminating the need for manual handling of heavy large-size holders and making the process easy to operate despite increased holder size.
Data Source
AI summary
A substrate attachment/detachment device which clamps and holds a substrate by means of first and second retaining members of a substrate holder, the device comprising a first holder retainer configured to hold the first retaining member in a first posture; and a second holder retainer configured to be movable in a linear manner toward and away from the first holder retainer, capable of holding the second retaining member in the first posture and a second posture which is substantially orthogonal to the first posture, configured to push the second retaining member against the first retaining member in the first posture to lock the first and second retaining members to each other.