Linear Reluctance Carrier Transport for Low-Particle Vacuum Handling
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Solution Overview
Problem
Existing transportation systems for carriers in vacuum environments, such as those used in substrate processing, face challenges including particle generation due to mechanical wear, high costs, and complex configuration and maintenance of magnetic levitation systems, which affect manufacturing efficiency and reliability.
Innovation Solution
A linear reluctance motor system is employed for contactless levitation and drive of carriers, combining both functions into a single apparatus using electromagnets and ferromagnetic materials, eliminating the need for separate levitation and drive systems, thereby reducing complexity and cost while enhancing reliability and uptime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-generated harmful factors
If a magnetic levitation system is used for contactless transportation of carriers, then particle generation due to wear of moving parts is reduced, but the cost and complexity of configuration and maintenance increase
Solution Approach 1:
The patent combines separate magnetic levitation and drive systems into a single integrated magnetic field system. The stator assembly generates both levitation force (vertical direction) and drive force (horizontal direction) through coordinated activation of electromagnet coils, eliminating the need for separate mechanical contact systems and reducing overall system complexity while maintaining contactless operation
Solution Approach 2:
The magnetic field system serves multiple functions simultaneously: it provides contactless levitation to suspend the carrier, contactless drive to move the carrier horizontally along the transport path, and contactless braking to stop the carrier. This multi-functional approach reduces the number of separate systems needed and simplifies configuration and maintenance
2Object-generated harmful factors
If a magnetic levitation system is used for contactless transportation of carriers, then particle generation due to wear of moving parts is reduced, but the cost increases
Solution Approach 1:
The patent combines separate magnetic levitation and drive systems into a single integrated magnetic field system. The stator assembly generates both levitation force (vertical direction) and drive force (horizontal direction) through coordinated activation of electromagnet coils, eliminating the need for separate mechanical contact systems and reducing overall system complexity while maintaining contactless operation
Solution Approach 2:
The patent replaces traditional mechanical contact-based drive systems with a magnetic field-based contactless drive system. Electromagnet coils generate magnetic forces that act on the ferromagnetic carrier without physical contact, eliminating wear and particle generation while reducing the need for complex mechanical components such as motors, gears, and bearings
3Reliability
If separate levitation and drive systems are used, then contactless transportation is achieved, but the complexity and maintenance requirements increase
Solution Approach 1:
The patent combines separate magnetic levitation and drive systems into a single integrated magnetic field system. The stator assembly generates both levitation force (vertical direction) and drive force (horizontal direction) through coordinated activation of electromagnet coils, eliminating the need for separate mechanical contact systems and reducing overall system complexity while maintaining contactless operation
Solution Approach 2:
The magnetic field system serves multiple functions simultaneously: it provides contactless levitation to suspend the carrier, contactless drive to move the carrier horizontally along the transport path, and contactless braking to stop the carrier. This multi-functional approach reduces the number of separate systems needed and simplifies configuration and maintenance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The integrated linear reluctance motor system provides a more efficient, reliable, and cost-effective solution for carrier transportation in vacuum environments by minimizing particle generation and simplifying maintenance, while reducing the need for rare earth materials and minimizing space requirements.
Implementation Method 1
The substrate or mask carrier is contactlessly levitated by a magnetic levitation force acting on the carrier
Implementation Method 2
The substrate or mask carrier is contactlessly transported in a vacuum chamber
Implementation Method 3
The at least one electromagnet is controlled to generate a magnetic field interacting with the ferromagnetic material to provide both a reluctance-based vertical force and a reluctance-based drive force acting on the mover
Data Source
AI summary
An apparatus for contactless transportation of a carrier is provided. The apparatus includes the carrier, being a substrate carrier or a mask carrier. The apparatus includes a linear reluctance motor for providing both a contactless levitation and a contactless drive of the carrier. The linear reluctance motor includes one or more linear stators defining a transportation track for the carrier. The linear reluctance motor includes a mover attached to the carrier. The linear reluctance motor includes a set of electromagnets and a first magnetic material. The one or more linear stators include the set of electromagnets and the mover includes the first magnetic material, or the mover includes the set of electromagnets and the one or more linear stators include the first magnetic material. The apparatus includes a controller connected to the set of electromagnets.