Linear Tool Carrying Route Optimization for Semiconductor Throughput
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Solution Overview
Problem
In semiconductor processing systems, linear tools face challenges in achieving the highest throughput due to varying carrying routes and robot operations, which differ by processing module position, unlike cluster tools where a single robot handles all routes uniformly.
Innovation Solution
A semiconductor processing system with multiple carrying robots and an operation control unit that generates and calculates various carrying routes based on device structure information, operation times, and processing times to determine the optimal route for highest throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conventional method of determining carrying route is used in linear tools, then the processing time of individual modules is optimized, but the overall throughput cannot be maximized due to varying robot operations across different routes
Solution Approach 1:
The patent implements dynamic route determination by calculating throughput for multiple candidate carrying routes and selecting the optimal route based on real-time system state. The operation control unit dynamically adjusts carrying routes for different wafers based on processing module completion times and robot availability, rather than using fixed conventional routes. This dynamic optimization resolves the contradiction by adapting route selection to current system conditions, maximizing throughput while managing complexity through algorithmic decision-making.
Solution Approach 2:
The patent changes the parameter of route selection from static/conventional to dynamic/optimal by introducing throughput calculation as a decision criterion. The system evaluates multiple carrying route candidates by calculating their respective throughput values based on processing times, robot operation times, and system state, then selects the route with highest throughput. This parameter change enables the system to overcome the limitations of conventional fixed route determination and achieve maximum productivity.
2Adaptability or versatility
If multiple carrying robots are used in linear tools, then flexibility in carrying routes is improved, but determining the optimal route becomes more complex
Solution Approach 1:
The patent employs feedback mechanisms by continuously monitoring the system state including processing module completion times, robot positions, and carrying route statuses. The operation control unit uses this feedback information to calculate throughput for different candidate routes and determine the optimal carrying route. This feedback-driven approach manages the complexity of multiple robots by using real-time system state information to guide route selection, transforming the complex multi-robot coordination problem into a manageable optimization task.
Solution Approach 2:
The patent applies preliminary action by pre-calculating candidate carrying routes and their associated throughput values before actual wafer processing begins. The system prepares multiple route options and evaluates them in advance based on device structure information and expected processing times, allowing the operation control unit to select the optimal route proactively rather than reactively. This preliminary calculation approach reduces the real-time decision complexity while maintaining high adaptability.
Data Source
AI summary
In a processing system of a linear tool in which plural carrying robots are arranged in carrying mechanical units to which processing modules are coupled and a processing target is delivered and received between the plural carrying robots, in the case where there are plural carrying routes on which the processing target is carried, the present invention provides a technique for determining the carrying route on which the highest throughput can be obtained.In the processing system of a linear tool, in the case where there are plural carrying routes on which the processing target is carried, the throughputs of the respective carrying routes are compared to each other, and the carrying route is determined by a unit for selecting the carrying route with the highest throughput.