Linear Vacuum Substrate Transport With Magnetic Bearings
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Solution Overview
Problem
Existing substrate processing systems in semiconductor and LED manufacturing require large radial transport chambers to manage multiple process modules, leading to a significant footprint and increased costs in micro-electronics fabrication environments.
Innovation Solution
A modular linear drive system with non-contact magnetic bearings and capacitive power coupling allows for the transportation of substrates along a linear path without physical contact, reducing the footprint by eliminating the need for large radial chambers and minimizing exposure to contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If radial transport chamber arrangement is used with multiple process modules, then substrate processing capability is improved, but footprint area increases significantly
Solution Approach 1:
The patent transitions from a radial arrangement (2D plane) to a linear arrangement (1D line), fundamentally changing the spatial dimension of the transport chamber. This linear configuration allows multiple process modules to be arranged in sequence along a linear path, significantly reducing the footprint area while maintaining the ability to process multiple substrates through the linear transport path.
Solution Approach 2:
The transport chamber is divided into multiple discrete process modules arranged linearly, with each module handling specific substrate processing tasks. This segmentation allows for modular expansion and optimization of the processing capability without requiring a proportional increase in footprint area, as the linear arrangement efficiently packs the modules in sequence.
2Object-affected harmful factors
If magnetic bearings are used for non-contact support, then contamination is reduced, but device complexity increases
Solution Approach 1:
The patent replaces traditional mechanical contact bearings with magnetic bearings that use magnetic fields for non-contact support. This substitution eliminates physical contact between moving parts, preventing contamination from mechanical wear and contact, while the magnetic field-based support system provides the necessary bearing function without the complexity of mechanical lubrication and contact management.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables efficient, contamination-free substrate transport between process modules, reducing cycle time and supporting parallel operation of multiple robots within a vacuum environment, while maintaining a compact footprint.
Implementation Method 1
at least one magnetic bearing which at least partially couples the supports to one another, where a first one of the magnetic bearings comprises a first permanent magnet and a second magnet
Implementation Method 2
a magnetic field adjuster connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet
Implementation Method 3
the first and second capacitive interfaces are sized, shaped and located relative to each other to provide a non-contacting capacitive power coupling and to allow heat transfer between the first and second capacitive interfaces
Implementation Method 4
a first heat pump connected to the first support, where at least one of the first magnetic bearing and the first power coupling comprise at least one active heat generating component, and where the first heat pump is configured to pump heat from the at least one active heat generating component to the heat radiator
Data Source
AI summary
An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.