Linear Wafer Expander Layout for Simpler Chip Separation
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Solution Overview
Problem
Existing expanding devices for dividing wafers into semiconductor chips have complex movement mechanisms due to the inclusion of a squeegee unit, which complicates the structure for supplying wafers between devices like the expander and squeegee unit.
Innovation Solution
An expanding device with an expander, cooler, heater, and squeegee unit aligned linearly in a plan view, using a single movement mechanism to supply wafers, thereby simplifying the movement mechanism structure and reducing device size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a squeegee unit is added to divide undivided wafer portions after expansion, then the completeness of wafer division is improved, but the movement mechanism structure becomes complex
Solution Approach 1:
The squeegee unit is integrated into the expander assembly, sharing the same linear movement mechanism. The squeegee unit and expander are positioned at different heights but aligned linearly, allowing a single movement mechanism to control both components for wafer expansion and undivided portion separation.
Solution Approach 2:
The squeegee unit is arranged in a vertical dimension relative to the expander, with both components aligned linearly along the movement direction. This spatial arrangement allows the same linear movement mechanism to drive both units without requiring additional complex positioning systems.
2Device complexity
If multiple devices (expander, cooler, heater, squeegee unit) are supplied by a single linear movement mechanism, then the movement mechanism structure is simplified, but the device size may increase
Solution Approach 1:
Multiple processing units (squeegee unit, expander, cooler, heater) are arranged linearly in the horizontal direction and positioned at different vertical heights. This three-dimensional layout allows a single linear movement mechanism to access all units without requiring excessive horizontal space, effectively managing device footprint.
Solution Approach 2:
A single linear movement mechanism serves multiple functions by controlling the squeegee unit, expander, cooler, and heater. This multi-functional approach simplifies the overall movement mechanism structure while the vertical stacking arrangement optimizes space utilization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The linear alignment of devices allows for a simplified movement mechanism that reduces the size and complexity of the expanding device, enabling efficient wafer division into semiconductor chips.
Implementation Method 1
at least one of a cooler to cool the sheet member before the sheet member is expanded by the expander
Implementation Method 2
a heater to heat and shrink the sheet member expanded by the expander while maintaining a gap between the plurality of semiconductor chips
Implementation Method 3
an expander to expand an elastic sheet member to divide a wafer into a plurality of semiconductor chips along a dividing line
Data Source
AI summary
An expanding device includes an expander, a cooler, a squeegee unit, and a movement mechanism. The expander, at least one of the cooler or a heater, and the squeegee unit are linearly aligned in a plan view.