Liner-Based Liquid Storage Empty Detection
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Solution Overview
Problem
Existing liquid containment systems for chemical reagents in microelectronic device manufacturing face challenges in maintaining high purity and detecting empty or near-empty conditions, particularly in zero or near-zero head space configurations where traditional methods fail to accurately determine depletion.
Innovation Solution
The implementation of integrated flowmeters and secondary volume systems within liner-based packaging, which utilize flow rate diminution and pressure transducers to detect empty or near-empty conditions, ensuring timely replacement and maintaining desired flow rates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional empty detection methods are used in zero or near-zero head space configurations, then the system structure remains simple, but the detection accuracy deteriorates and fails to accurately determine depletion
Solution Approach 1:
The patent introduces an intermediary detection mechanism that indirectly measures liquid depletion through flow rate monitoring and pressure changes. Instead of directly detecting the liquid level in zero head space configuration, the system uses flowmeters and pressure sensors as intermediaries to infer depletion status from flow characteristics, resolving the contradiction between detection accuracy and system simplicity.
Solution Approach 2:
The patent replaces traditional mechanical level detection methods with flow-based detection using flowmeters and pressure-based detection using transducers. This substitution enables accurate empty detection in zero head space configurations where mechanical level sensors cannot function, improving measurement precision without requiring complex mechanical structures.
2Productivity
If liner packages are used without flow rate monitoring, then the device complexity is low, but the productivity deteriorates due to inability to detect depletion timely
Solution Approach 1:
The patent implements feedback control by continuously monitoring flow rate through integrated flowmeters and comparing it against expected flow characteristics. When flow rate diminution indicates approaching depletion, the system provides feedback signals to trigger replacement actions, thereby improving productivity through timely detection without requiring complex centralized control systems.
Solution Approach 2:
The monitoring system is designed to autonomously detect depletion conditions and trigger replacement notifications without requiring external monitoring equipment or complex control systems. The flowmeter and pressure transducer system serves itself by automatically comparing actual flow against expected flow patterns and generating depletion alerts, improving productivity while maintaining relatively simple device architecture.
3Speed
If pressure is applied to collapse the liner for dispensing, then the dispensing speed increases, but the measurement precision deteriorates when liquid is depleted and pressure drops
Solution Approach 1:
The patent applies preliminary action by monitoring pressure and flow rate trends before complete depletion occurs. The system detects approaching depletion through gradual pressure drops and flow rate diminution during the pressurized dispensing process, allowing timely replacement before the pressure collapse that would occur at complete depletion, thereby maintaining both high dispensing speed and accurate depletion detection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively manages the dispensing operation by accurately detecting depletion, preventing flow rate reductions and ensuring continuous high-purity dispensing, thereby optimizing the utilization of liner packages and maintaining product quality.
Implementation Method 1
integrated flowmeters and secondary volume systems within liner-based packaging, which utilize flow rate diminution and pressure transducers to detect empty or near-empty conditions
Implementation Method 2
integrated flowmeters and secondary volume systems within liner-based packaging, which utilize flow rate diminution and pressure transducers to detect empty or near-empty conditions
Data Source
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AI summary
Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.