Linewidth Compensation for Sweepable Exposure-Beam Patterning
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Solution Overview
Problem
Existing micro-lithographic printing processes face challenges in achieving critical dimension linearity, particularly in the X direction, due to mechanical and optical imperfections in printing heads, which result in deviations from intended patterns, affecting the precision and accuracy of printed features.
Innovation Solution
A method and system for obtaining line width compensating data by printing a calibration pattern with sweepable exposure beams, measuring line widths, and computing adjustments to adapt print data to compensate for deviations, incorporating proximity indicators to account for exposure and unexposure line characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If exposure dose adjustment is performed for wrongly positioned beams, then beam position errors are corrected, but CDL deviations cannot be compensated
Solution Approach 1:
The patent applies preliminary action by pre-compensating line width deviations in the print data before printing. A calibration pattern is printed first to measure actual line widths, and compensation values are calculated and stored. These compensation values are then applied to subsequent print jobs to correct for mechanical and optical imperfections in the printing head, thereby achieving CDL accuracy without requiring real-time adjustments during printing.
2Manufacturing precision
If calibration patterns with multiple line widths are printed, then line width deviations are measured, but printing speed and accuracy requirements increase
Solution Approach 1:
The calibration pattern is printed once during setup to establish compensation values that are then reused for multiple subsequent print jobs. This preliminary calibration action enables fast production printing without repeatedly printing calibration patterns, thus maintaining high printing speed while achieving accurate line width control through the pre-computed compensation data.
3Manufacturing precision
If mechanical and optical properties of printing head are improved, then printing accuracy is enhanced, but device complexity and cost increase
Solution Approach 1:
The patent changes the parameter being controlled from physical printing head properties to digital compensation values. Instead of improving mechanical and optical properties of the printing head, the system measures actual line width deviations and applies software-based compensation to the print data. This approach achieves high printing accuracy without increasing device complexity or cost.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances critical dimension linearity by allowing more precise control over line widths, improving the accuracy and repeatability of pattern printing, especially for narrow lines, and reducing the need for frequent recalibrations.
Implementation Method 1
masks produced by laser-based mask writers are common for use for manufacturing of different kinds of advanced chips and image devices
Implementation Method 2
By varying the power of the laser beam coordinated with the relative motion, an exposure pattern can be written onto the substrate
Data Source
AI summary
A method for obtaining line width compensating data for a workpiece patterning device comprises printing of a calibration pattern with an exposure beam that is sweepable in a sweep direction. The calibration pattern has a multitude of exposed and unexposed lines extending in the sweep direction having different line widths and different distances to neighboring lines. Line widths are measured. Deviations of the measured line widths are calculated. Based on the calculated deviations, line width compensating data is computed, intended for adapting line widths of pattern print data prior to printing to compensate for the calculated deviations. The line width compensating data is associated with at least an intended line width and information about whether the line is an exposed or unexposed line. A method for calibrating print data and a method for printing a pattern based thereon are also disclosed as well as systems therefore.