Linewidth Measurement Using Connected-Region Image Processing
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Solution Overview
Problem
Existing linewidth measurement methods in line preparation processes are inefficient and prone to large errors due to the reliance on manual measurement using electron microscopes and professional software, which are time-consuming and inaccurate.
Innovation Solution
A method and apparatus for automatic linewidth measurement involving image preprocessing, region connecting, edge point determination, and width calculation using image processing techniques to accurately measure line widths in nano-scale images.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual measurement using electron microscopes and professional software is used, then measurement capability is achieved, but measurement efficiency is low and time consumption is high
Solution Approach 1:
The patent replaces the mechanical/manual measurement system (electron microscope operation and manual software measurement) with an automated image processing system. The system uses computer-based image acquisition, edge detection algorithms, and automatic width calculation to eliminate manual intervention, thereby大幅提高 measurement efficiency while maintaining accuracy through standardized processing procedures.
Solution Approach 2:
The patent creates a digital copy of the physical line structure through image acquisition from electron microscope or other imaging devices. This digital replica is then processed through image processing algorithms to extract width information, eliminating the need for direct manual measurement on the original sample and enabling efficient automated analysis.
2Measurement precision
If manual measurement using electron microscopes and professional software is used, then measurement capability is achieved, but measurement accuracy is low due to human error
Solution Approach 1:
The patent replaces manual measurement operations with automated image processing algorithms. The system consistently applies the same edge detection and width calculation algorithms to all measurements, eliminating variability introduced by different operators and ensuring high reliability and repeatability of measurement results.
Solution Approach 2:
The measurement system performs self-calibration and self-measurement through automated algorithms. The edge detection and width calculation are executed automatically without human intervention, ensuring that the measurement process serves itself with consistent, objective criteria rather than subjective human judgment.
3Productivity
If automated image processing is used, then measurement efficiency is improved, but device complexity increases
Solution Approach 1:
The patent divides the measurement process into distinct modular stages: image acquisition, image preprocessing (binarization, noise filtering), edge detection, region identification, and width calculation. Each stage is handled by separate processing functions, making the overall system more manageable and easier to implement despite the increased automation.
Solution Approach 2:
The image processing system is designed to handle multiple types of line structures and imaging conditions using the same core algorithms. The edge detection and width measurement functions are universal and can be applied to various line patterns, reducing the need for specialized complex procedures for different measurement scenarios.
Data Source
AI summary
A linewidth measurement method includes: obtaining a target image of the line, the line including a first line segment; performing region connecting on an edge image or binary image of the target image to obtain a region connected image, the region connected image including a target connected region corresponding to a pattern of the line, and a pixel value of each pixel in the target connected region being different from that of each pixel outside the target connected region; determining a first edge point and a second edge point of the first line segment based on the region connected image; and determining a width of the first line segment according to the first edge point and the second edge point, and determining the width of the line according to the width of the first line segment.