Link Device Routing Density in Integrated Fan-Out Packages

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Solution Overview

Problem

The semiconductor industry faces limitations in increasing circuit density due to physical constraints in two-dimensional integrated circuits, prompting the exploration of three-dimensional ICs, but existing 3D IC formation methods are complex and inefficient.

Innovation Solution

A high-density interconnect structure for integrated fan-out packages is developed, involving a carrier substrate, adhesive layer, polymer layer, seed layer, vias, semiconductor devices, encapsulant, and link devices to create a high-density routing system that overcomes traditional limitations by using semiconductor processing methods to form link devices that connect and encapsulate semiconductor dies.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional 3D IC formation methods are used (bonding two dies together with wire bonds), then electrical connections are established between dies, but the process becomes complex and inefficient

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent extracts and eliminates the intermediate carrier substrate and wire bonding steps from the traditional 3D IC formation process. By directly bonding dies to the substrate and forming conductive vias through the substrate, the complex intermediate steps are removed, simplifying the manufacturing process while maintaining electrical connection reliability

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent performs preliminary actions by pre-forming conductive vias and contact pads in the substrate before die bonding. This preliminary preparation enables direct electrical connections to be established through the substrate, eliminating the need for subsequent wire bonding operations and reducing process complexity

Inventive Principle:
Principle #10Preliminary action

2Ease of manufacture

If two-dimensional integrated circuits are used, then manufacturing is simpler, but circuit density is limited by physical constraints

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidcircuit density
Core Design Contradiction:
Ease of manufactureVSQuantity of substance

Solution Approach 1:

The patent transitions from two-dimensional circuit layout to three-dimensional architecture by stacking multiple semiconductor dies vertically and establishing electrical connections through the substrate. This dimensional change enables significantly higher circuit density while maintaining manufacturing simplicity through direct bonding and via formation techniques

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Quantity of substance

If more devices are integrated into one chip, then circuit density increases, but design complexity increases

Engineering Contradiction:
Improvecircuit densityVSAvoiddesign complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent segments the integrated circuit into multiple separate semiconductor dies that are bonded to a common substrate. Each die can be designed and manufactured independently with optimized functionality, reducing individual design complexity while achieving high overall circuit density through the multi-die configuration

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS10861830B2Semiconductor device
Publication Date: 2020.12.08 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US10861830B2 patent drawing
  • US10861830B2 patent drawing
  • US10861830B2 patent drawing

AI summary

A link device with a large density routing is attached to a package in order to provide a high-density interconnect pathway to interconnect semiconductor devices. In an embodiment the package is an integrated fan out package. The link device may be bonded on either side of the package, and the package may optionally comprise through package vias. The link device may also be an integrated passive device that includes resistors, inductor, and capacitor components.