Liquid Supply Bath Circulation Layout for Stagnation-Free Dispensing
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Solution Overview
Problem
Conventional liquid supply systems in semiconductor manufacturing face issues with particle generation due to liquid stagnation, which leads to defects in the photo process, and the need for dummy dispensing to prevent stagnation lowers productivity.
Innovation Solution
A liquid supply bath device with a main body containing a flow passage, accommodation space, and connection passage, equipped with an opening/closing valve and a detachable discharge unit, along with a circulation line and valves, to prevent liquid stagnation and particle generation by continuous circulation and controlled supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If dummy dispensing processing is performed to prevent liquid stagnation, then particle generation is reduced, but productivity is lowered due to nozzle unit movement to home port
Solution Approach 1:
The liquid supply system is divided into two independent circulation paths: a main circulation path for continuous liquid circulation during standby, and a dummy dispensing path for particle prevention. This segmentation allows the system to maintain liquid flow without requiring nozzle movement, thus preventing particles while maintaining productivity.
Solution Approach 2:
A separate circulation line with its own pump and valve system acts as an intermediary mechanism to maintain liquid flow in the main supply line during standby periods. This intermediary system prevents stagnation and particle generation without requiring the nozzle unit to perform dummy dispensing movements.
2Reliability
If liquid is periodically discharged through nozzle unit during standby, then liquid stagnation is reduced, but device complexity increases due to additional control requirements
Solution Approach 1:
The stagnation prevention function is extracted from the nozzle unit and transferred to a separate circulation system. The circulation line with its dedicated pump and control valve handles liquid circulation independently, simplifying the control logic while maintaining effective stagnation prevention.
3Reliability
If continuous liquid circulation is implemented, then particle generation from stagnation is prevented, but energy consumption increases
Solution Approach 1:
Instead of continuous circulation, the system uses periodic circulation controlled by timing the opening/closing valve. The circulation pump operates intermittently to maintain sufficient liquid flow and prevent stagnation, reducing energy consumption while still preventing particle generation effectively.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents particle generation and improves productivity by reducing liquid stagnation, maintaining cleanliness, and eliminating the need for dummy dispensing treatments.
Implementation Method 1
a circulation line in which a circulation opening/closing valve is disposed and configured to circulate the liquid supplied through the liquid supply line to the supply tank
Implementation Method 2
an opening/closing valve disposed on the main body and configured to open and close the connection passage
Implementation Method 3
a discharge unit detachably inserted into the accommodation space, and configured to suck the liquid in the accommodation space and discharge the liquid to a substrate
Data Source
AI summary
A liquid supply bath device includes a main body including a flow passage having an inlet through which liquid flows in and an outlet through which the liquid flows out, an accommodation space in which the liquid is accommodated and of which an upper portion is opened to insert a discharge unit configured to discharge the liquid to a substrate, and a connection passage connected to the flow passage and the accommodation space. The liquid supply bath device further includes an opening/closing valve disposed on the main body and configured to open and close the connection passage.