Flowing Liquid Chamber for Debris-Free Laser Processing
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Solution Overview
Problem
Existing laser processing technologies face challenges in preventing debris adhesion to workpieces during processing, leading to reduced productivity and quality issues, particularly when using liquid resin coatings or processing in water, which can obstruct the laser beam.
Innovation Solution
A laser processing apparatus with a liquid supply mechanism that creates a flowing liquid chamber with a transparent plate above the workpiece, allowing the laser beam to pass through while preventing debris adhesion, using a dispersing mechanism to maintain beam application without obstruction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a liquid resin coating is applied to the workpiece surface before laser processing, then debris adhesion to device surfaces is prevented, but additional coating and removal steps are required, reducing productivity
Solution Approach 1:
The harmful liquid resin coating step is extracted and removed from the process. Instead of applying resin to prevent debris adhesion, the patent uses a liquid flow system that actively removes debris during processing, eliminating the need for pre-coating and post-removal steps while maintaining debris prevention
Solution Approach 2:
A liquid mediator (water or other liquid) is introduced as an intermediary substance that flows between the laser beam and workpiece surface. This liquid serves dual functions: it prevents debris adhesion similar to resin coating, and it can be continuously circulated and removed, avoiding the productivity loss associated with resin application and removal steps
2Object-affected harmful factors
If the workpiece is immersed in water during laser processing, then debris adhesion is prevented, but minute bubbles generated obstruct laser beam propagation
Solution Approach 1:
The liquid medium is transformed from a static immersion environment to a dynamic flowing system. The liquid flows continuously across the workpiece surface in a controlled manner, preventing bubble accumulation and maintaining laser beam propagation paths clear while still preventing debris adhesion through the liquid medium
Solution Approach 2:
The liquid is not applied uniformly across the entire workpiece surface but is directed locally to specific processing areas where laser processing occurs. This localized application prevents bubble formation in non-processing areas and minimizes interference with laser beam propagation while maintaining debris prevention effectiveness
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables uninterrupted laser processing by preventing debris adhesion and maintaining processing quality without the need for resin coatings or water immersion, enhancing productivity and economic efficiency.
Implementation Method 1
a laser oscillator adapted to emit a laser beam, and a condenser adapted to focus the laser beam emitted by the laser oscillator
Implementation Method 2
a laser beam of such a wavelength as to be absorbed in a workpiece is applied to the workpiece, with a focal point of the laser beam positioned on a surface of the workpiece, to perform ablation
Implementation Method 3
a liquid supply nozzle adapted to supply a liquid to the gap from one side of the liquid chamber, and a liquid discharge nozzle adapted to recover the liquid from the other side of the liquid chamber, to produce a flow of the liquid
Data Source
AI summary
A laser processing apparatus includes a liquid supply mechanism at an upper portion of a holding unit. The liquid supply mechanism includes: a liquid chamber provided with a transparent plate located with a gap formed between the transparent plate and an upper surface of a workpiece held by the holding table; a liquid supply nozzle adapted to supply a liquid to the gap from one side of the liquid chamber; and a liquid discharge nozzle adapted to recover the liquid from the other side of the liquid chamber, to produce a flow of the liquid. A laser beam applying unit includes a condenser adapted to focus a laser beam emitted by a laser oscillator, to apply the laser beam to the workpiece held by the holding table through the transparent plate and the liquid supplied to the gap.