Processing Liquid Circulation Control for Precise Temperature Reset
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Solution Overview
Problem
Existing processing liquid supply devices struggle to maintain an appropriately regulated temperature for processing liquids when the processing liquid supply device and substrate processing apparatus are spaced apart, due to the large volume of pipes involved, leading to temperature inconsistencies in the processing liquid.
Innovation Solution
A processing liquid supply device with a storage, supply pipe, circulation pipe, pump, liquid drain, and replenisher, controlled by a controller that adjusts temperature based on the entire circulation path's temperature, using a liquid drain and replenisher to regulate the temperature of the processing liquid.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the processing liquid supply device is spaced apart from the substrate processing apparatus, then the device can be installed more flexibly and independently, but the pipe volume increases causing temperature regulation difficulties
Solution Approach 1:
The system performs preliminary temperature adjustment by draining a predetermined amount of processing liquid before temperature changes and replenishing with fresh liquid. This preliminary action ensures that the temperature regulation accounts for the thermal mass in the circulation pipes, allowing the processing liquid to reach the desired temperature at the substrate processing apparatus despite the distance.
Solution Approach 2:
The temperature sensor detects the temperature of processing liquid in the circulation pipe and feeds this information back to the control unit. The control unit uses this feedback to determine when to activate the liquid drain and replenisher, creating a closed-loop control system that maintains accurate temperature regulation despite the spatial separation and large pipe volume.
2Length of stationary object
If the pipe volume between the supply device and substrate processing apparatus is large, then the device can be located farther away, but the temperature of processing liquid becomes difficult to regulate accurately
Solution Approach 1:
Before changing the temperature setting, the control unit drains a predetermined amount of processing liquid from the circulation pipe through the liquid drain. This preliminary drainage removes the thermally massive liquid that would otherwise resist temperature changes, allowing the new temperature setting to take effect more accurately and quickly despite the long pipe distance.
Solution Approach 2:
The system changes the physical state and composition of the processing liquid in the circulation path by draining old liquid and replenishing with fresh liquid from the storage tank. This parameter change (compositional and thermal) allows the system to reset the thermal characteristics of the circulation path to match the new temperature requirements.
3Device complexity
If temperature regulation is performed without considering the circulation pipe temperature, then the control system is simpler, but the processing liquid temperature at the substrate processing apparatus is inaccurate
Solution Approach 1:
A temperature sensor is installed in the circulation pipe to directly measure the temperature of processing liquid in the pipeline. This feedback signal is sent to the control unit, which uses it to determine when to activate the liquid drain and replenisher, ensuring accurate temperature regulation without requiring complex predictive models or multiple sensors throughout the system.
Solution Approach 2:
The temperature sensor acts as an intermediary element that provides direct temperature measurement from the circulation pipe to the control unit. This single measurement point serves as a representative indicator of the overall system temperature state, simplifying the control architecture while maintaining accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device effectively maintains and adjusts the temperature of the processing liquid to the desired setting, ensuring consistent supply to the substrate processing apparatus even with large pipe volumes, thereby improving temperature regulation and efficiency.
Implementation Method 1
a pump that sends out the processing liquid stored in the storage from the outlet to the supply pipe
Implementation Method 2
a liquid drain that is provided in the circulation pipe and configured to be capable of discharging the processing liquid flowing through the circulation pipe
Implementation Method 3
a heater that heats the processing liquid in the circulation path
Implementation Method 4
a temperature sensor that detects a temperature of the processing liquid in the circulation path
Implementation Method 5
a controller that, in a case in which a temperature setting value is changed, brings a temperature of the processing liquid close to a changed setting value by controlling the liquid drain and the replenisher based on a temperature of the processing liquid in an entire circulation path
Data Source
AI summary
A supply pipe connects an inlet of a storage to a substrate processing apparatus. A circulation pipe connects the substrate processing apparatus to an inlet of the storage. A pump sends out a processing liquid stored in the storage from an outlet to a supply pipe. A liquid drain is provided in the circulation pipe and is configured to be capable of discharging the processing liquid flowing through the circulation pipe. A replenisher is configured to be capable of replenishing the storage with the processing liquid. In a case in which a temperature setting value is changed, a control device brings a temperature of the processing liquid close to a changed setting value by controlling the liquid drain and the replenisher based on a temperature of the processing liquid in the entire circulation path that includes a temperature of the processing liquid flowing through the circulation path.