Liquid Container Adapter With Gas-Tight Coupling and Complete Emptying

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Solution Overview

Problem

Conventional adapters and connection devices for liquid containers in wet process modules, such as lacquering modules, are not completely gas-tight, leading to issues during emptying and inefficient liquid exchange.

Innovation Solution

A multi-part adapter with a container part and a channel part, featuring independent channel portions and a seal, ensures a gas-tight coupling with the supply system, allowing for complete emptying of the liquid container through an obliquely oriented immersion tube and quick coupling mechanisms.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a conventional adapter and connection device are used, then the liquid container can be easily coupled to the supply system, but the coupling is not completely gas-tight leading to leakage problems

Engineering Contradiction:
Improveease of couplingVSAvoidgas-tightness
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The adapter is divided into a container part and a channel part that can be separately assembled. The container part attaches to the liquid container while the channel part connects to the supply system, allowing each part to be optimized for its specific function and enabling complete gas-tight sealing at both interfaces

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The adapter acts as an intermediary component between the liquid container and the supply system. It provides sealing elements that create gas-tight connections at both the container interface and the supply system interface, preventing leakage while maintaining ease of coupling

Inventive Principle:
Principle #24Intermediary (Mediator)

2Device complexity

If a conventional adapter design is used, then the structure is simple, but the liquid container cannot be completely emptied

Engineering Contradiction:
Improveadapter structureVSAvoidliquid emptying completeness
Core Design Contradiction:
Device complexityVSLoss of substance

Solution Approach 1:

The channel part is designed to be rotatable relative to the container part, allowing dynamic adjustment of the channel orientation. This enables the channel to be positioned at an oblique angle that directs liquid flow toward the lowest point of the container, ensuring complete emptying while maintaining a relatively simple overall structure

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The channel portions are configured to extend in multiple directions and at different angles rather than in a single straight line. This multi-dimensional channel arrangement allows liquid to be directed toward the lowest point of the container from various orientations, enabling complete emptying without significantly increasing structural complexity

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Loss of substance

If independent channel portions are used, then complete emptying is enabled, but the device complexity increases

Engineering Contradiction:
Improveliquid emptying completenessVSAvoidchannel configuration
Core Design Contradiction:
Loss of substanceVSDevice complexity

Solution Approach 1:

Multiple channel portions are merged into a single integrated channel part that contains continuous first and second channel portions. These channels share common components such as the mouth area and sealing elements, reducing overall device complexity while maintaining the capability for complete liquid emptying through oblique orientation

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS11776827B2Adapter, connection device and supply system
Publication Date: 2023.10.03 SUSS MICROTEC LITHOGRAPHY GMBH
  • US11776827B2 patent drawing
  • US11776827B2 patent drawing
  • US11776827B2 patent drawing

AI summary

An adapter for a liquid container of a supply system of a wet process module for the treatment of substrates has a container part for fastening to the liquid container and a channel part for fastening to the supply system. The container part has a central opening and a fastening device for fastening the container part to the liquid container. The channel part has a continuous first channel portion and a continuous second channel portion, the first and the second channel portion each opening into the central opening of the container part.