Liquid-Cooled Pulse Generator Coupling for High-Voltage Switching
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Solution Overview
Problem
Plasma treatment applications, such as etching or layer deposition, require high voltage and high frequency rectangular, asymmetrical, pulsed voltage supplies, which often exceed the voltage handling capabilities of individual semiconductor switches, especially during high frequency operation.
Innovation Solution
A high power generator system comprising multiple low power generators with energy storage components, electrically connected through a coupling mechanism, allowing for the selection of LP generator contributions to generate high voltage and current pulses with step-function outputs, and utilizing direct liquid cooling for improved efficiency and size reduction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If high voltage and high frequency pulsed power is used for plasma treatment, then plasma process performance is improved, but individual semiconductor switches cannot handle the voltage requirements
Solution Approach 1:
The patent divides the high power generator into multiple low power generators, each with its own energy storage component. This segmentation allows each individual generator to operate within safe voltage limits while the combined system delivers the required high voltage and power through the coupling mechanism.
2Reliability
If multiple low power generators are combined to achieve high power output, then voltage handling is improved, but device complexity increases
Solution Approach 1:
The patent combines multiple low power generators through a coupling mechanism that integrates their outputs. This merging approach allows the system to achieve high voltage and power capabilities while maintaining manageable complexity through modular design and standardized coupling interfaces.
3Loss of energy
If direct liquid cooling is implemented, then power losses are reduced and efficiency is improved, but device complexity increases
Solution Approach 1:
The patent implements direct liquid cooling by immersing the low power generators in a dielectric cooling liquid. This hydraulic cooling approach efficiently removes heat and reduces power losses while the dielectric property of the cooling liquid provides additional electrical insulation, reducing the need for separate cooling and insulation systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the delivery of high power pulses with sharp voltage transitions and reduced power losses, effectively addressing the limitations of existing technologies in handling high voltage and frequency demands in plasma processes.
Implementation Method 1
The HP generator is at least partially directly liquid cooled, by being immersed in a dielectric cooling liquid
Data Source
AI summary
A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the plurality of LP generators is electrically connected, and a control unit. During operation, at least in some states of the HP generator, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the plurality of LP generators. The control unit is configured to select a respective contribution of each of the plurality of LP generators in order to generate a rise and/or a decay of a pulse at the output of the coupling. The HP generator is at least partially directly liquid cooled, by being immersed in a dielectric cooling liquid.