Liquid Cooling Device with Electrostatic Membrane Actuation

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing cooling systems for microelectronic devices, which rely on liquid coolants and mechanical actuators like pumps or motors, are complex to manufacture and require improved cooling solutions.

Innovation Solution

A device with a fluid network featuring deformable membranes and actuation means that modulate cavity volumes to facilitate liquid circulation, combined with thermal conducting elements for enhanced heat dissipation, providing a simpler and more effective cooling mechanism.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a pump or motor is used to circulate liquid coolant, then cooling efficiency is improved, but device complexity and manufacturing difficulty increase

Engineering Contradiction:

Improvecooling efficiencyVSAvoiddevice complexity

Core Design Contradiction:

TemperatureVSDevice complexity

Solution Approach 1:

The patent replaces the mechanical pump or motor system with an electrostatic actuation system. The actuator uses electrostatic forces to deform a membrane, which modulates the cavity volume and drives liquid circulation without mechanical moving parts. This substitution eliminates the complexity of mechanical pumps while maintaining cooling functionality.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the physical state or parameters of the actuation mechanism from mechanical rotation/movement to electrostatic field-induced deformation. By applying voltage to the electrostatic actuator, the membrane deformation parameter changes, which in turn modulates the cavity volume parameter to drive liquid flow, achieving cooling without mechanical complexity.

Inventive Principle:

Principle #35Parameter changes

2Device complexity

If electrostatic or piezoelectric actuators are used for fluid actuation, then device complexity is reduced, but actuation precision and control may be insufficient

Engineering Contradiction:

Improvedevice complexityVSAvoidactuation precision

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The patent employs a dynamic membrane deformation mechanism where the electrostatic actuator continuously adjusts the membrane shape in response to applied voltage. This dynamic control allows precise modulation of the cavity volume and liquid flow rate, achieving the required actuation precision without mechanical complexity.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The system incorporates feedback control where the electrostatic actuator's deformation is controlled based on the desired liquid circulation requirements. By monitoring and adjusting the actuation voltage, the system achieves precise control over the membrane deformation and resulting fluid actuation, compensating for any precision limitations.

Inventive Principle:

Principle #23Feedback

3Ease of manufacture

If deformable membranes are used to modulate cavity volume, then liquid circulation is simplified, but manufacturing precision of membrane deformation may be challenging

Engineering Contradiction:

Improveease of manufactureVSAvoidmembrane deformation precision

Core Design Contradiction:

Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent uses a flexible membrane as the deformable element in the cavity wall. This thin film structure is inherently easier to manufacture than rigid mechanical components, as it can be fabricated using standard microfabrication techniques. The membrane's flexibility allows it to deform uniformly and predictably when actuated, achieving the required deformation precision through material properties rather than complex mechanical structures.

Inventive Principle:

Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables easier implementation and improved cooling efficiency by simplifying the circulation of liquid coolants and enhancing heat dissipation through the use of deformable membranes and thermal conducting elements, reducing manufacturing complexity and improving thermal management in microelectronic devices.

Implementation Method 1

The actuator is of the electrostatic type and comprises a mobile electrode arranged facing a fixed electrode

Methodology Applied

Scientific EffectElectrostatic force: Electrostatics

Implementation Method 2

a thermal conducting element close to the channel or in contact with the channel, the thermal conducting element passing through the support and having a higher thermal conductivity than the thermal conductivity of the support

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS10251308B2Cooling device for electronic components using liquid coolant

Publication Date: 2019.04.02 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

AI summary

A device used for cooling a component including a support to receive a component to be cooled, is provided. The support includes a fluid network in which a liquid will circulate. The network includes a first cavity, a second cavity, and a first channel connecting the first cavity to the second cavity, a first deformable membrane and a second deformable membrane forming a mobile wall of the first cavity and a mobile wall of the second cavity respectively. The device further an actuation device for actuating the first membrane and the second membrane, the actuating device including a fixed electrode located on one or several protuberances of the support.