Liquid-Coupled WGM Resonators for Mass Production

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Solution Overview

Problem

The manufacturing of coupled whispering gallery mode (WGM) optical resonators is hindered by the need for precise and expensive electron beam lithography due to the small coupling distance required for near-infrared and ultraviolet wavelengths, limiting mass production of devices such as UV lasers and sensors.

Innovation Solution

The use of high refractive index liquids for evanescent-wave coupling between WGM optical resonators allows for coupling gap dimensions that can be fabricated using standard photolithography, enabling economic and rapid mass production of coupled WGM resonators-based devices.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If electron beam lithography is used to achieve precise coupling distance for WGM resonators, then coupling precision is improved, but manufacturing cost and production time increase

Engineering Contradiction:
Improvecoupling distance precisionVSAvoidmass production capability
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

A liquid medium with refractive index n3 is introduced as an intermediary between the two WGM resonators. This liquid fills the coupling gap and enables evanescent wave coupling with much larger gap distances (greater than 100 nm) compared to air coupling. The liquid's high refractive index enhances the evanescent field interaction, allowing standard photolithography to achieve the required coupling precision without expensive electron beam lithography.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention changes the refractive index parameter of the coupling medium from air (n≈1) to a liquid with higher refractive index (n3>1). This parameter change allows the coupling gap distance to be increased from less than 100 nm to greater than 100 nm, making the structure manufacturable with standard photolithography while maintaining effective optical coupling between resonators.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If coupling gap distance is reduced for effective evanescent coupling in air, then optical coupling efficiency is improved, but fabrication complexity and cost increase

Engineering Contradiction:
Improveoptical coupling efficiencyVSAvoidfabrication simplicity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The liquid medium serves as an intermediary that enhances the evanescent field interaction between resonators. By filling the coupling gap with a liquid of higher refractive index, the optical coupling efficiency is improved without requiring extremely small gap distances, thus avoiding the need for complex electron beam lithography fabrication processes.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention uses a liquid (hydraulic medium) instead of gas (air) as the coupling medium. This hydraulic approach leverages the higher refractive index of liquids to enhance optical coupling, allowing for larger, more easily fabricated gap distances while maintaining reliable optical interaction between the resonators.

Inventive Principle:
Principle #29Pneumatics and hydraulics

3Productivity

If standard photolithography is used for fabricating coupling gaps, then manufacturing cost and production speed improve, but achievable coupling precision decreases

Engineering Contradiction:
Improvemass production speedVSAvoidcoupling gap precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The liquid medium acts as an intermediary that compensates for the lower precision of standard photolithography. By enhancing the optical interaction through the high refractive index liquid, effective coupling is achieved with larger gap distances that are within the fabrication capabilities of standard photolithography, enabling mass production.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

Changing the coupling medium from air to a liquid with higher refractive index allows the coupling gap to be enlarged from sub-100 nm to greater than 100 nm. This parameter change makes the structure compatible with standard photolithography fabrication processes, enabling cost-effective mass production while maintaining optical coupling functionality.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances tunability and sensing selectivity while facilitating the production of coupled WGM resonators-based lasers, sensors, and signal processors for various applications, overcoming the limitations of traditional fabrication methods.

Implementation Method 1

evanescently coupling whispering gallery mode optical resonators having a liquid coupling

Methodology Applied
Scientific EffectEvanescent coupling: Total Internal Reflection

Implementation Method 2

whispering gallery mode (WGM) optical resonators

Methodology Applied
Scientific EffectWhispering gallery mode: Total Internal Reflection

Implementation Method 3

introducing high refractive index liquids that can be dynamically flown between WGM optical resonators

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS11650370B1Method of evanescently coupling whispering gallery mode optical resonators using liquids
Publication Date: 2023.05.16 THE GOVERNMENT OF THE UNITED STATES AS REPRESENTED BY THE SECRETARY OF THE AIR FORCE
  • US11650370B1 patent drawing
  • US11650370B1 patent drawing
  • US11650370B1 patent drawing

AI summary

The present invention relates to evanescently coupling whispering gallery mode optical resonators having a liquid coupling as well as methods of making and using same. The aforementioned evanescently coupling whispering gallery mode optical resonators having a liquid couplings provide increased tunability and sensing selectivity over current same. The aforementioned. Applicants' method of making evanescent-wave coupled optical resonators can be achieved while having coupling gap dimensions that can be fabricated using standard photolithography. Thus economic, rapid, and mass production of coupled WGM resonators-based lasers, sensors, and signal processors for a broad range of applications can be realized.