Liquid Delivery Member Slit Gap Control for Resist Uniformity

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Solution Overview

Problem

In the imprint method for forming fine patterns, foam entrapment defects often occur due to the joining of resist droplets, leading to non-uniform Residual Layer Thickness (RLT) in the resist pattern formed by the inkjet method.

Innovation Solution

A liquid delivery member with a slit configuration and piezoelectric elements is used to adjust the resist delivery amount, allowing for precise control of the resist thickness by varying the slit gap through applied voltage, ensuring uniform RLT by adjusting the resist delivery in a continuous or discontinuous manner.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If resist is dropped onto a processing object by an inkjet method, then a resist pattern is formed, but foam entrapment defects occur and RLT becomes non-uniform

Engineering Contradiction:

ImproveRLT uniformityVSAvoidfoam entrapment defects

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the inkjet mechanical droplet ejection system with a liquid delivery member that uses capillary action and controlled liquid flow through a slit to deliver resist. This substitution eliminates the foam entrapment issues associated with inkjet droplet joining while maintaining precise resist placement capability.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs hydraulic principles by using a liquid delivery member with a slit through which liquid resist flows in a controlled manner. The liquid flow is regulated to achieve uniform thickness without the foam entrapment problems of inkjet methods, leveraging fluid dynamics for precise resist delivery.

Inventive Principle:

Principle #29Pneumatics and hydraulics

2Manufacturing precision

If a template is brought into contact with the resist to form patterns, then fine patterns are formed, but foam entrapment occurs at joined resist droplet positions

Engineering Contradiction:

Improvepattern formation accuracyVSAvoidfoam entrapment at droplet junctions

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the inkjet droplet deposition mechanism with a continuous or semi-continuous liquid flow system through a slit. This eliminates the discrete droplet junctions where foam entrapment occurs in inkjet methods, while still enabling precise pattern formation through controlled liquid delivery.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent achieves homogeneous resist distribution by using a liquid delivery member that provides uniform liquid flow across the processing object surface. This homogeneous delivery prevents the non-uniform thickness and foam entrapment that occur when discrete inkjet droplets are joined together.

Inventive Principle:

Principle #33Homogeneity

3Quantity of substance

If inkjet method is used to drop resist, then resist pattern is formed, but RLT uniformity is compromised

Engineering Contradiction:

Improveresist delivery controlVSAvoidRLT uniformity

Core Design Contradiction:

Quantity of substanceVSManufacturing precision

Solution Approach 1:

The patent uses hydraulic flow control through a liquid delivery member with a slit to regulate resist delivery. This hydraulic approach provides superior control over liquid flow and thickness uniformity compared to inkjet droplet ejection, enabling precise resist quantity control while maintaining RLT uniformity.

Inventive Principle:

Principle #29Pneumatics and hydraulics

Solution Approach 2:

The patent changes the delivery mechanism parameter from discrete inkjet droplet ejection to continuous liquid flow through a slit. This parameter change enables better control over resist thickness and uniformity, eliminating the RLT variation caused by droplet joining while maintaining precise delivery control.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively suppresses foam entrapment and achieves a uniform RLT on the processing object, enabling consistent resist pattern formation across the semiconductor substrate.

Implementation Method 1

a first piezoelectric element 33 and a second piezoelectric element 33 are arranged on each of the faces that form the slit 133

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS11282723B2Liquid delivery member, liquid delivery apparatus, and semiconductor device manufacturing method

Publication Date: 2022.03.22 KIOXIA CORP

AI summary

According to one embodiment, a liquid delivery member is provided which is to be arranged at a predetermined distance from a processing object, and which is configured to deliver a liquid from a slit while the liquid delivery member and the processing object are caused to make relative displacement therebetween in a first direction. The liquid delivery member includes a delivery amount adjustment part provided on a face that forms the slit, extending in a second direction orthogonal to the first direction, and configured to adjust a delivery amount of the liquid.