Liquid Discharge Head Substrate Temperature Detection Wiring
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Solution Overview
Problem
The accuracy of temperature detection in liquid discharge head substrates is compromised due to hydrogen adsorption affecting the resistance values of temperature detection elements, leading to variations in detection characteristics during the annealing process.
Innovation Solution
Incorporating a wiring pattern with specific opening portions in the insulating film between the substrate and temperature detection elements, where some openings are embedded with the film and arranged at the ends of the liquid discharge region, to uniformly supply hydrogen and maintain consistent resistance values across temperature detection elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a temperature detection element is arranged near the heater to detect temperature changes, then the liquid discharge state can be indicated, but hydrogen from the interlayer dielectric layer is adsorbed to the detection element causing resistance value changes and deterioration in detection accuracy
Solution Approach 1:
A wiring pattern is introduced as an intermediary structure between the interlayer dielectric layer and the temperature detection element. This wiring pattern acts as a mediator that selectively allows hydrogen to be adsorbed, thereby protecting the temperature detection element from direct hydrogen adsorption and preventing resistance value changes that would compromise detection accuracy.
Solution Approach 2:
The harmful effect of hydrogen adsorption is redirected from the temperature detection element to the wiring pattern. By allowing the wiring pattern to absorb the hydrogen that would otherwise affect the detection element, the system converts a harmful adsorption event into a benign occurrence that does not compromise measurement precision.
2Measurement precision
If the temperature detection element is placed close to the heater for accurate detection, then real-time liquid discharge state can be monitored, but the detection element is exposed to hydrogen discharge during annealing causing characteristic variations
Solution Approach 1:
The wiring pattern serves as a protective intermediary positioned between the hydrogen source (interlayer dielectric layer) and the temperature detection element. This intermediary structure absorbs the harmful hydrogen discharge during annealing, preventing it from reaching and affecting the detection element's characteristics while allowing the detection element to remain close to the heater for accurate temperature monitoring.
Solution Approach 2:
The harmful hydrogen discharge during annealing is converted into a beneficial protective mechanism. The wiring pattern deliberately absorbs the hydrogen that would otherwise degrade the detection element, transforming a harmful exposure into a controlled event that protects the critical detection component while maintaining measurement precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This arrangement ensures uniform temperature detection accuracy and reduces the need for subsequent correction systems, simplifying the liquid discharge head and apparatus design by minimizing hydrogen-induced variations in resistance values.
Implementation Method 1
a plurality of temperature detection elements arranged along the first direction to detect temperatures of the plurality of electrothermal converting elements
Implementation Method 2
a thermal type apparatus that discharges a liquid by using the thermal energy generated by an electrothermal converting element (heater)
Implementation Method 3
hydrogen in an interlayer dielectric layer is discharged in a process such as annealing and can be adsorbed to the detection element
Implementation Method 4
hydrogen in an interlayer dielectric layer is discharged in a process such as annealing
Data Source
AI summary
A liquid discharge head substrate including a substrate, electrothermal convertors arranged on a surface of the substrate along a first direction, temperature detectors arranged along the first direction, liquid supply ports arranged along the first direction and a structure including wiring layer in an insulator arranged between the surface and the temperature detectors is provided. A wiring pattern arranged in the wiring layer which is nearest to the temperature detectors is provided with opening portions arranged along the first direction so as to be adjacent to the temperature detectors. The opening portions include first openings and second openings, each of the liquid supply ports passes through a corresponding one of the first openings, and the second openings are embedded with part of the insulator and are arranged at least two ends of an array of the opening portions.