Liquid Discharge Device Substrate Peeling Detection via Counter EMF Waveform
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Solution Overview
Problem
Conventional liquid discharge devices cannot effectively detect chip peeling at the discharge portion, which affects the discharge performance, as partial peeling may not cause liquid leakage but multiple peeling issues can lead to leakage, and existing methods rely on counter electromotive force for air bubble detection rather than substrate peeling.
Innovation Solution
A liquid discharge device equipped with a detection unit to identify peeling of the bonding surface between substrates forming the discharge port, utilizing the counter electromotive force waveform to differentiate between normal and abnormal discharge conditions, specifically detecting peeling by analyzing the amplitude and phase of the counter electromotive force waveform for each nozzle.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional counter electromotive force detection is used, then air bubbles and foreign substances can be detected, but substrate peeling cannot be detected
Solution Approach 1:
The patent changes the detection parameters by analyzing specific characteristics of the counter electromotive force waveform (amplitude, phase, frequency components) to differentiate between air bubbles, foreign substances, and substrate peeling. This allows the same detection system to identify multiple different defects by examining different aspects of the waveform signal.
2Ease of manufacture
If chip bonding is performed without peeling detection, then manufacturing process is simple, but liquid leakage occurs due to undetected peeling
Solution Approach 1:
The patent performs substrate peeling detection using counter electromotive force analysis immediately after chip bonding, before the discharge device is put into full operation. This preliminary detection identifies bonding defects early, allowing corrective action to be taken before liquid leakage problems occur during actual discharge operations.
3Reliability
If partial peeling occurs inside the chip, then liquid does not leak, but detection is still needed to prevent multiple peeling issues
Solution Approach 1:
The patent utilizes the piezoelectric element's inherent ability to generate counter electromotive force during normal operation as a self-diagnostic tool. The detection system analyzes the counter electromotive force waveform that is naturally produced when the piezoelectric element is driven, eliminating the need for separate external sensors or complex additional detection hardware.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate detection of substrate peeling, preventing liquid leakage by identifying changes in the counter electromotive force waveform, ensuring reliable discharge performance and minimizing errors in the imprint process.
Implementation Method 1
a piezoelectric element provided in correspondence with the discharge port, and configured to generate energy for discharging the liquid from the discharge port
Implementation Method 2
the residual vibration of a vibrating portion, which is generated after forcibly vibrating the vibrating portion by applying a driving pulse to the piezoelectric element, may be detected as a counter electromotive force by the same piezoelectric element
Data Source
AI summary
A liquid discharge device includes a container configured to contain a liquid; a discharge port which is formed by bonding a plurality of substrates and from which the liquid supplied from the container is discharged; a piezoelectric element provided in correspondence with the discharge port, and configured to generate energy for discharging the liquid from the discharge port; and a detection unit configured to detect peeling of a bonding surface between the plurality of substrates forming the discharge port.