Liquid-discharging nozzle gap control via independent optical focusing
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Solution Overview
Problem
Existing liquid-discharging devices for substrates with fine patterns face challenges in maintaining discharge accuracy due to variable nozzle-substrate gaps and limited nozzle mobility, leading to decreased accuracy and workability, especially when dealing with small amounts of liquid and multiple repair locations.
Innovation Solution
A liquid-discharging device with a focal point position adjustment mechanism and nozzle position adjustment mechanism allows for precise control of the nozzle's position relative to the substrate, enabling accurate gap adjustment and independent nozzle movement within the visual field, ensuring clear observation and precise discharge.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the objective optical system and discharging nozzle are integrated without independent adjustment mechanisms, then the device structure is simplified, but the discharge accuracy decreases due to gap variation
Solution Approach 1:
The patent introduces independent adjustment mechanisms that enable dynamic modification of the system configuration. The discharging nozzle can be independently moved vertically via a nozzle vertical position adjustment mechanism, and the objective optical system can be independently focused via a focal point position adjustment mechanism, allowing the system to adapt to different substrates and maintain optimal performance.
Solution Approach 2:
The patent divides the integrated system into independently controllable modules: the discharging nozzle assembly with its vertical position adjustment mechanism, the objective optical system with its focal point adjustment mechanism, and the stage assembly. This segmentation allows each component to be optimized and adjusted independently, resolving the contradiction between structural simplicity and discharge accuracy.
2Device complexity
If the objective optical system and discharging nozzle are integrated, then the system is compact, but the nozzle cannot be moved independently within the visual field reducing workability
Solution Approach 1:
The patent makes the previously static integrated system dynamic by introducing independent movement capabilities. The nozzle horizontal position adjustment mechanism allows the discharging nozzle to be moved independently in the horizontal direction within the visual field of the objective optical system, enabling repair work at multiple locations without moving the entire integrated assembly.
Solution Approach 2:
By segmenting the control of the nozzle from the objective optical system, the patent enables independent horizontal movement of the nozzle while keeping the objective optical system stationary. This segmentation of movement functions maintains system compactness while dramatically improving workability for multi-location repair tasks.
3Adaptability or versatility
If the gap between nozzle and substrate varies, then the device can accommodate different substrates, but the discharge accuracy decreases for small amounts of liquid
Solution Approach 1:
The patent implements a feedback control system where the actual gap distance between the nozzle and substrate is measured (using methods such as optical focusing or direct measurement) and this information is used to control the nozzle vertical position adjustment mechanism to maintain the optimal gap distance, thereby preserving discharge accuracy across different substrate conditions.
Solution Approach 2:
The patent enables dynamic adjustment of the gap distance parameter through the nozzle vertical position adjustment mechanism. By changing this critical parameter to match the specific substrate thickness or repair requirements, the system maintains optimal discharge accuracy while accommodating different substrates, particularly for the precise discharge of small amounts of liquid.
4Adaptability or versatility
If the substrate position changes, then different areas can be accessed, but the focusing is lost and observation image becomes unclear
Solution Approach 1:
The patent employs feedback control through the focal point position adjustment mechanism that continuously monitors the focus state of the objective optical system and automatically adjusts the focal point position to maintain sharp imaging, even when the substrate position changes during observation or repair operations.
Solution Approach 2:
The patent transforms the static focus setting into a dynamic adjustment capability. The focal point position adjustment mechanism allows real-time modification of the focus position to track substrate movements or accommodate different substrate thicknesses, maintaining clear observation images across various substrate positions and areas.
Data Source
AI summary
In a liquid discharging device, an objective optical system is moved in the optical axis direction by a focus position adjusting mechanism to perform a first focusing action relative to the tip of a liquid discharging nozzle or a mirror image thereof and a second focusing action relative to the surface of a substrate facing the liquid discharging nozzle, the distance between the nozzle tip and the surface of the substrate is calculated on the basis of the resulting focus positions, and the position of the liquid discharging nozzle is adjusted by nozzle position adjusting mechanism so that the gap is appropriate. According to this configuration, the distance between the nozzle tip and the surface of the substrate can be precisely calculated and an optical unit for observation can be focused on the surface of the substrate.