Liquid Dispensing Flow Split to Prevent Nozzle Particle Contamination

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Solution Overview

Problem

Existing liquid dispensing systems for wafer treatment, such as semiconductor wafers, suffer from the presence of solid particles due to mechanical movement in valves, which are not filtered out and can contaminate or block nozzles, leading to inefficient processing.

Innovation Solution

A liquid dispensing apparatus with a junction that branches the supply flow path into a dispense and return or drain flow path, with a valve or pump on the return flow path downstream of the junction to control the liquid flow, preventing solid particles from entering the dispense path and ensuring no moving parts between the pressurized liquid source and the nozzle.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a valve is placed in the supply flow path to control liquid flow, then the dispensing control is improved, but solid particles are generated due to mechanical movement and can contaminate the dispensed liquid

Engineering Contradiction:

Improvedispensing controlVSAvoidsolid particle contamination

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The valve is extracted from the supply flow path and placed in the return flow path instead. This removes the source of particle generation from the liquid path that feeds the nozzle, eliminating the contamination problem while preserving flow control capability through the return path valve.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

Instead of controlling liquid flow directly in the supply path (conventional approach), the invention inverts the control mechanism by placing the valve in the return flow path. This indirect control method prevents particle generation in the dispensed liquid while achieving the same flow regulation objective.

Inventive Principle:

Principle #13The other way round (Inversion)

2Object-affected harmful factors

If a filter is added to remove solid particles, then the liquid purity is improved, but the device complexity increases

Engineering Contradiction:

Improvesolid particle contaminationVSAvoidsystem complexity

Core Design Contradiction:

Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The invention extracts the source of particles (valve) from the liquid supply path, eliminating the need for additional filtration systems. This removes the problem at its origin rather than adding complex mitigation measures downstream.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The invention replaces the mechanical filtration approach with a mechanical repositioning approach - moving the valve to the return path. This substitution eliminates particle generation at the source without requiring complex filtration mechanisms in the supply path.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS12512343B2Apparatus for dispensing a liquid

Publication Date: 2025.12.30 LAM RES AG

AI summary

An apparatus for dispensing a liquid comprising: a supply flow path; a pressurised liquid source arranged to supply pressurised liquid to the supply flow path; a junction downstream of the pressurised liquid source, wherein at the junction the supply flow path is branched into a dispense flow path and a return or drain flow path; and a valve or pump in the return or drain flow path downstream of the junction.