Liquid-Ejection Head Depressed Portion Filling Method
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Solution Overview
Problem
The existing methods for producing liquid-ejection heads with inorganic orifice plates formed by chemical vapor deposition (CVD) result in depressed portions that accumulate liquid particles, leading to printing quality degradation due to liquid pools, and require costly and time-consuming equipment for filling these depressions.
Innovation Solution
A method involving the formation of molds on a substrate, deposition of an inorganic material by CVD to create a flow-passage-forming member with depressed portions, followed by filling these portions with a photosensitive resin and grinding to expose the orifice plate, and then forming ejection ports, which allows for efficient filling and suppression of liquid pools.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If molds are formed on the substrate and inorganic material is deposited by CVD to create the flow-passage-forming member, then the orifice plate and liquid-chamber side walls are formed with high precision, but depressed portions are created between adjacent liquid-chamber side walls where liquid particles accumulate forming liquid pools that degrade printing quality
Solution Approach 1:
The patent applies preliminary action by forming filling members in the depressed portions before forming the ejection ports. The filling members are deposited conformally on the inner walls of the depressed portions through CVD, creating a preliminary structure that prevents liquid particle accumulation. This preliminary filling action eliminates the harmful liquid pools before they can form during subsequent operations, while preserving the high precision of the orifice plate formation.
2Object-affected harmful factors
If the depressed portions are filled using conventional plating equipment, then the liquid pools are suppressed, but the production cost and time increase significantly
Solution Approach 1:
The patent merges the filling member formation process with the existing CVD production line used for creating the orifice plate and liquid-chamber side walls. The same CVD equipment and process conditions are utilized to deposit the filling members in the depressed portions, eliminating the need for separate plating equipment and processes. This integration maintains liquid pool suppression while significantly improving productivity and reducing production costs.
3Measurement precision
If the photosensitive resin layer is ground to expose the orifice plate surface, then the ejection ports can be formed accurately, but the filling members in the depressed portions must be precisely controlled to maintain surface flatness
Solution Approach 1:
The patent applies local quality by creating filling members with different properties in different locations. The filling members are formed conformally on the inner walls of the depressed portions with controlled thickness and material composition. During the grinding process, the filling members provide localized support that maintains surface flatness in the depressed portions while allowing the orifice plate surface to be exposed with high precision. The local filling structure enables accurate ejection port formation without compromising overall surface flatness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively suppresses the formation of liquid pools and maintains printing quality by efficiently filling depressed portions, reducing production costs and enhancing the accuracy of ejection port formation.
Implementation Method 1
forming the flow-passage-forming member by depositing an inorganic material on or above the substrate and the molds by chemical vapor deposition
Implementation Method 2
forming a photosensitive resin layer by depositing a photosensitive resin on the flow-passage-forming member
Implementation Method 3
forming filling members in the depressed portions by grinding the photosensitive resin layer until an upper surface of the orifice plate is exposed
Data Source
AI summary
A liquid-ejection head including:a substrate on or above which a plurality of actuators are formed, the plurality of actuators generating energy for ejecting a liquid; anda flow-passage-forming member on or above the substrate, the flow-passage-forming member defining ejection ports through which the liquid is ejected and a plurality of liquid chambers each having a corresponding one of the plurality of actuators,the flow-passage-forming member including an orifice plate defining the ejection ports and liquid-chamber side walls defining side walls of the plurality of liquid chambers,the flow-passage-forming member being formed of an inorganic material and having a depressed portion between the liquid chambers, and the depressed portion being filled with a photosensitive resin.