Liquid Ejection Device Multi-Angle Port Inspection

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Solution Overview

Problem

Existing techniques for observing and examining liquid ejection devices are unable to detect abnormalities in the liquid circulation path and ejection port surface, leading to potential defects such as defective ejection, quality degradation, and substrate contamination.

Innovation Solution

A liquid ejection device equipped with an image capturing mechanism and a lighting unit that captures images of the ejection port surface at multiple incidence angles, allowing for the detection of defects in both the ejection port surface and the liquid circulation channel by switching between bright field and dark field observations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single lighting position is used for image capture, then the device complexity is reduced, but the measurement precision is insufficient to detect defects in both ejection port surface and liquid circulation channel

Engineering Contradiction:
Improvedefect detection capabilityVSAvoidlighting unit configuration
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The lighting unit is designed to be movable between multiple positions (first position for bright field observation, second position for dark field observation) rather than being fixed. This dynamic positioning allows the system to switch between different observation modes to detect various types of defects in the ejection port surface and liquid circulation channel, thereby improving measurement precision without requiring multiple separate lighting devices.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

A single lighting unit is designed to perform multiple functions by being positioned at different locations. When positioned at the first position, it provides bright field observation for detecting certain defect types. When positioned at the second position, it provides dark field observation for detecting other defect types. This multi-functional design eliminates the need for separate lighting devices for different observation modes, resolving the contradiction between measurement precision and device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If multiple lighting positions are used to detect different defect types, then the measurement precision is improved, but the ease of operation is reduced

Engineering Contradiction:
Improvedefect detection capabilityVSAvoidimage capture operation
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The control unit automatically controls the movement of the lighting unit between different positions based on the detection requirements. The system can switch between bright field and dark field observation modes automatically, reducing the manual intervention required from the operator. This automated control mechanism maintains high measurement precision while simplifying the operation process.

Inventive Principle:
Principle #23Feedback

3Measurement precision

If imaging is performed only at the ejection position, then the ease of operation is maintained, but the measurement precision is insufficient to examine the liquid circulation channel

Engineering Contradiction:
Improveexamination coverageVSAvoidmaintenance position requirement
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The system is designed to perform image capture at a maintenance position that is different from the ejection position. By positioning the imaging device at this predetermined maintenance location, the system can preliminarily examine the ejection port surface and liquid circulation channel before actual ejection operations begin. This preliminary examination capability expands the examination coverage to include the liquid circulation channel, which would be difficult to access during normal ejection operations.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables effective examination of the liquid ejection unit, preventing defects and maintaining the device's operational state by identifying and addressing issues in the ejection port surface and liquid circulation channel.

Implementation Method 1

a lighting unit configured to irradiate the ejection port surface at a plurality of incidence angles with respect to the ejection port surface

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentUS11511315B2Liquid ejection device, imprint apparatus, and examination method
Publication Date: 2022.11.29 CANON KK
  • US11511315B2 patent drawing
  • US11511315B2 patent drawing
  • US11511315B2 patent drawing

AI summary

A liquid ejection device includes: a liquid ejection unit with an ejection port surface provided with an ejection port from which liquid is ejected and configured to eject the liquid onto a substrate at an ejection position; an image capturing mechanism configured to face the ejection port surface of the liquid ejection unit and to capture an image of the ejection port surface at a maintenance position different from the ejection position; and a lighting unit configured to irradiate the ejection port surface at multiple incidence angles with respect to the ejection port surface in an operation of capturing an image of the ejection port surface by the image capturing mechanism.