Liquid Ejection Apparatus Substrate Retraction for Dust Prevention
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Solution Overview
Problem
The inkjet printing system used in electronics faces challenges with dust deposition during the formation of nanoscale patterns, as the apparatus has multiple sliding parts that generate dust, and existing solutions do not adequately address this issue.
Innovation Solution
A liquid ejection apparatus with a movement control device that retracts the substrate outside the projected feeding region of the liquid ejection head and supporting member before starting the feeding operation, and outside the projected rotation region during head rotation, to prevent dust and foreign matter deposition on the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the inkjet printing system uses multiple sliding parts for substrate scanning and head feeding, then the productivity and scanning capability are improved, but dust is generated that deposits on the substrate
Solution Approach 1:
The patent extracts the harmful dust-generating sliding parts from the operational space by retracting the substrate during head feeding movements. The substrate is moved out of the projection area of the liquid ejection head and supporting member before feeding operations occur, effectively separating the substrate from the dust generation zone while maintaining the productivity benefits of multiple sliding parts
Solution Approach 2:
The substrate moving device performs preliminary retraction of the substrate before the liquid ejection head and supporting member execute their feeding operations. This preliminary action positions the substrate outside the projected feeding region in advance, preventing dust deposition before it can occur, while still allowing the high-speed scanning and feeding operations to proceed
2Manufacturing precision
If the substrate is continuously present during head feeding operations, then the manufacturing precision is maintained, but dust deposition occurs on the substrate
Solution Approach 1:
The substrate is extracted from the harmful influence zone by retracting it outside the projected feeding region during head feeding operations. This spatial separation removes the substrate from the dust generation area while maintaining manufacturing precision through precise retraction and positioning control
Solution Approach 2:
The system applies preliminary anti-action by retracting the substrate before dust can be generated and deposited. The substrate moving device anticipates the feeding operation and positions the substrate outside the projected feeding region in advance, preventing the harmful effect before it occurs
3Object-affected harmful factors
If clean room and clean booth measures are implemented, then dust deposition is reduced, but the apparatus complexity and cost increase
Solution Approach 1:
The patent replaces the complex mechanical environmental control systems (clean room, clean booth) with a simpler mechanical motion control solution. By using the substrate moving device to retract the substrate during feeding operations, dust prevention is achieved through motion control rather than environmental control, significantly reducing apparatus complexity
Solution Approach 2:
The substrate moving device performs dual functions: it not only positions the substrate for liquid ejection but also protects the substrate from dust by retracting it during feeding operations. This self-service approach integrates dust protection into the existing motion control system without requiring separate clean room infrastructure
Data Source
AI summary
According an aspect of the present invention, when causing the liquid ejection head to perform a feeding operation along a first direction, the substrate is retracted outside the projected feeding region of the liquid ejection head and the supporting member thereof prior to starting the feeding operation of the liquid ejection head, preventing dusts and other foreign matters, generated as a result of the feeding operation of the liquid ejection head and the supporting member, from being deposited on a surface of the substrate onto which the liquid is to be deposited.